The low-complexity RF MEMS switch at EADS: An overview

International Journal of Microwave and Wireless Technologies

Volumn 3, Issue 5, 2011, Pages 499-508

  Schoenlinner, Bernhard ^a   Stehle, Armin ^a   Siegel, Christian ^b   Gautier, William ^a   Schulte, Benedikt ^a   Figur, Sascha ^a   Prechtel, Ulrich ^a   Ziegler, Volker ^a  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b EPCOS AG   (Germany)

Author keywords

Microelectromechanical devices; Microelectromechanical systems; Microwave circuits; Switches; Tunable circuits and devices

Indexed keywords

100 GHZ; CAPACITIVE SWITCH; DIELECTRIC LAYER; EXPERIMENTAL INVESTIGATIONS; FREQUENCY RANGES; GERMANY; LOW-COMPLEXITY; MICRO ELECTRO MECHANICAL SYSTEM; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS; RF-MEMS SWITCHES; RF-POWER; SILICON SUBSTRATES; TUNABLE CIRCUITS AND DEVICES; TUNABLE FILTERS;

COMPOSITE MICROMECHANICS; ELECTRIC SWITCHES; INNOVATION; ION IMPLANTATION; MECHATRONICS; MEMS; MICROWAVE CIRCUITS; MICROWAVE DEVICES; POLES; SILICON COMPOUNDS; SILICON OXIDES; STEERABLE ANTENNAS;

MICROELECTROMECHANICAL DEVICES;

EID: 80455178873     PISSN: 17590787     EISSN: 17590795     Source Type: Journal    
DOI: 10.1017/S1759078711000729     Document Type: Review

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