Low complexity RF-MEMS switch optimized for operation up to 120°C

Proceedings of the 37th European Microwave Conference, EUMC

Volumn , Issue , 2007, Pages 1229-1232

  Stehle, A ^a   Siegel, C ^a   Ziegler, V ^a   Schonlinner B ^a   Prechtel, U ^a   Thilmont, S ^b   Seidel, H ^b   Schmid, U ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b SAARLAND UNIVERSITY   (Germany)

Author keywords

Alloy; Aluminium; Bended beams; Microwave; RF MEMS; Switch; Temperature; Thermal oxide

Indexed keywords

A-STABLE; ALLOY; ALUMINIUM; BENDED BEAMS; CHARGING EFFECTS; EUROPEAN; HIGH TEMPERATURE RANGE; LOW-COMPLEXITY; METALLIZATION; MICROWAVE; RF PERFORMANCE; RF-MEMS; RF-MEMS SWITCHES; SILICON SUBSTRATES; SWITCH; TEMPERATURE; TEMPERATURE STABLE; THERMAL OXIDE; VERY LOW COMPLEXITY;

CHLORINE COMPOUNDS; COMPOSITE MICROMECHANICS; ELECTRIC SWITCHES; INDUSTRIAL MANAGEMENT; LITHOGRAPHY; MEMS; METALLIZING; MICROELECTROMECHANICAL DEVICES; MICROWAVES; NONMETALS; OPTICAL DESIGN; OPTIMIZATION; SILICON;

SWITCHES;

EID: 48349105125     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2007.4405422     Document Type: Conference Paper

References (6)

1. C. Siegel, V. Ziegler, B. Schönlinner, U. Prechtel, H. Schumacher, "Very low complexity RF-MEMS technology for wide range tunable microwave filters", in Proc. European Microwave Conf, 2005, p. 637-640.
2. th Memswave in Orvieto, 2006, pp 30-33
3. C. Siegel, V. Ziegler, U. Prechtel, H. Schumacher, "Low-complexity RF-MEMS technology for microwave phase shifting applications" German Microwave Conf., Ulm, Germany, 5-7. April 2005, pp. 13-16
4. G. Papaioannou, M. N. Exarchos, V. Theonas, G. Wang, J. Papapolymerou, "Temperature Study of the Dielectric Polarization Effects of Capacitive RF-MEMS Switches", IEEE Trans. Microwave Theory Techn., Vol. 53, No. 11, pp 3467- 3473, Nov. 2005.
5. David Becher, Richard Chan, Michael Hattendorf, Milton Feng, "Reliability Study of Low-Voltage RF MEMS Switches", GaAsMANTECH Conference,2002
6. Brandon Pillans, Gabriel Rebeiz, Jeong-Bong Lee, "Advances in RF MEMS Technology", IEEE GaAs Digest, 2003