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Volumn 100, Issue 5, 2009, Pages 1208-1210
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Glass cap packaged high isolating Ka-Band RF-MEMS switch
a a,c a a a b b
c
Brunel GmbH
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
KA BAND;
LOW DIELECTRIC CONSTANTS;
NON-HERMETIC;
RF-MEMS;
RF-MEMS SWITCHES;
ROOM-TEMPERATURE PROCESS;
SILICON SUBSTRATES;
TIME PERIODS;
ULTRA-VIOLET LIGHT;
ELECTRIC SWITCHES;
GLASS;
MICROELECTROMECHANICAL DEVICES;
ULTRAVIOLET RADIATION;
MEMS;
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EID: 67650487126
PISSN: 00164232
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (1)
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References (7)
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