Very low complexity RF-MEMS technology for wide range tunable microwave filters

35th European Microwave Conference 2005 - Conference Proceedings

Volumn 1, Issue , 2005, Pages 637-640

  Siegel, C ^a   Ziegler, V ^a   Prechtel, U ^a   Schonlinner B ^a   Schumacher, H ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b UNIVERSITY OF ULM   (Germany)

Author keywords

Aluminum; Microwave; RF MEMS; Rolling stubs; Stress; Tunable filter

Indexed keywords

ALUMINUM; ELECTROSTATICS; METALLIZING; MICROWAVE FILTERS; STRESSES; TECHNOLOGICAL FORECASTING; TUNING;

ROLLING STUBS; TUNABLE FILTERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33847128916     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2005.1608937     Document Type: Conference Paper

References (5)

1. G. M. Rebeiz, J. B. Muldavin, "RF MEMS switches and switch circuits," IEEE Microwave Mag., pp 59-71, December 2001.
2. A. Abbaspour-Tamijani, L. Dussopt, G. M. Rebeiz, "Miniatur and Tunable Filters Using MEMS Capacitors," IEEE Transaction on MicrowaweTheorie and Techniques, Vol. 51, No.7, pp 1878-1885, July 2003.
3. W. M. Van Spengen, "MEMS Reliability Stiction, Charging and RF MEMS," Ph.D. thesis, IMEC, Leuven, Belgium, May 2004.
4. C. Siegel, V. Ziegler, U. Prechtel, H. Schumacher, "Low-complexity RF-MEMS technology for microwave phase shifting applications," German Microwave Conf., pp.13-16, Ulm, Germany, 5.-7. April 2005.
5. V. Ziegler, C. Siegel, B. Schönlinner, U. Prechtel, H. Schumacher, "RF-MEMS switches based on a low-complexity technology and related aspects of MMIC integration," to be presented at the European Microwave Week, Paris, France, October 2005.