Origins and mitigation of spurious modes in aluminum nitridemicroresonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2010, Pages 1272-1276

  Olsson, Roy H ^a   Wojciechowski, Kenneth E ^a   Branch, Darren W ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Aluminum Nitride; Microresonator; RF MEMS; Spurious Mode

Indexed keywords

MATCHING NETWORKS; MICRO RESONATORS; NARROW BANDWIDTH; OUT OF BAND REJECTION; RF-MEMS; SPURIOUS MODE; SPURIOUS MODES; SPURIOUS RESPONSE; PASS BANDS;

ALUMINUM NITRIDE; NITRIDES; RESONATORS; ULTRASONICS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ALUMINUM; BANDPASS FILTERS;

ALUMINUM; NITRIDES;

EID: 80054059161     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2010.5935667     Document Type: Conference Paper

References (9)

1. R. H. Olsson III, J. G. Fleming, K. E. Wojciechowski, M. S. Baker and M.R. Tuck, "Post-CMOS compatible aluminum nitride MEMS filters and resonantsensors," Proc. of the IEEE Frequency Control Symposium, pp. 412-419, June2007.
2. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Piezoelectricaluminum nitride vibrating contour-mode MEMS resonators," Journal ofMicroelectromechanical Systems, vol. 15, no. 6, pp 1406-1418, Dec. 2006.
3. K. E. Wojciechowski, R. H. Olsson, T. A. Hill, M. R. Tuck and E.Roherty-Osmun, "Single-chip precision oscillators based on multi-frequency,high-Q aluminum nitride MEMS resonators," IEEE International Solid-StateSensors, Actuators and Microsystems Conference, pp. 2126-2130, June, 2009.
4. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Single-chip multiplefrequency ALN MEMS filters based on contour-mode piezoelectric resonators,"Journal of Microelectromechanical Systems, vol. 16, no. 2, pp. 319-328, April2007.
5. K. E. Wojciechowski, R. H. Olsson III and M. R. Tuck, "Super highfrequency width extensional aluminum nitride MEMS resonators," IEEEUltrasonics Symposium, pp. 1179-1182, Sept. 2009.
6. G. Piazza and A. P. Pisano, "Two-Port stacked piezoelectric aluminumnitride contour-mode resonant MEMS," Sensors and Actuators A, 136, pp.638-645, 2007.
7. K. E. Wojciechowski and R .H. Olsson III, "Parallel lattice filtersutilizing aluminum nitride contour mode resonators," Solid-State Sensor,Actuator, and Microsystems Workshop, pp. 65-69, June 2010.
8. R. H. Olsson III, C. M. Washburn, J. E. Stevens, M. R. Tuck and C. D.Nordquist, "VHF and UHF Mechanically Coupled Aluminum Nitride MEMSFilters," IEEE Frequency Control Symposium, pp. 634-639, June 2008.
9. T. Shiba, S. Oosawa, J. Hamasaki, Y. Fujita and T. Chiba, "Low lossSAW double-mode structure suppressing spurious raditation," Proc. Of the2004 IEEE International Ultrasonics, Ferroelectrics and Freq. Cntrl. Conf., pp.2008-2011, 2004.