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Volumn 18, Issue 9, 2011, Pages

Electrical time resolved metrology of dust particles growing in low pressure cold plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE ELECTRODES; ANALYTICAL MODELLING; CAPACITIVELY COUPLED; COLD PLASMAS; DISCHARGE CHANGES; DUST PARTICLE; ELECTRICAL PARAMETER; LOW FREQUENCY; LOW PRESSURES; RADIO FREQUENCIES; REAL TIME; SELF BIAS VOLTAGE; TIME-RESOLVED;

EID: 80053559083     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3630935     Document Type: Article
Times cited : (20)

References (44)
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    • International Technology Roadmafor Semiconductors, Technical Report, 2009
    • International Technology Roadmap for Semiconductors, Technical Report, 2009.
  • 22
    • 0035945107 scopus 로고    scopus 로고
    • Detection of particles of less than 5 nm in diameter formed in an argon-silane capacitively coupled radio-frequency discharge
    • DOI 10.1063/1.1425431
    • L. Boufendi, J. Gaudin, S. Huet, G. Viera, and M. Dudemaine, Appl. Phys. Lett. 79 (26), 4301 (2001). 10.1063/1.1425431 (Pubitemid 34047787)
    • (2001) Applied Physics Letters , vol.79 , Issue.26 , pp. 4301
    • Boufendi, L.1    Gaudin, J.2    Huet, S.3    Viera, G.4    Dudemaine, M.5
  • 26
    • 0026173053 scopus 로고
    • 10.1088/0022-3727/24/6/011
    • C. Bohm and J. Perrin, J. Phys. D 24 (6), 865 (1991). 10.1088/0022-3727/24/6/011
    • (1991) J. Phys. D , vol.24 , Issue.6 , pp. 865
    • Bohm, C.1    Perrin, J.2
  • 36
    • 0035945107 scopus 로고    scopus 로고
    • Detection of particles of less than 5 nm in diameter formed in an argon-silane capacitively coupled radio-frequency discharge
    • DOI 10.1063/1.1425431
    • L. Boufendi, J. Gaudin, S. Huet, G. Viera, and M. Dudemaine, Appl. Phys. Lett. 79 (26), 4301 (2001). 10.1063/1.1425431 (Pubitemid 34047787)
    • (2001) Applied Physics Letters , vol.79 , Issue.26 , pp. 4301
    • Boufendi, L.1    Gaudin, J.2    Huet, S.3    Viera, G.4    Dudemaine, M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.