A vacuum pressure sensor based on ZnO nanobelt film

Nanotechnology

Volumn 22, Issue 43, 2011, Pages

  Zheng, X J ^a,b   Cao, X C ^a   Sun, J ^a   Yuan, B ^a   Li, Q H ^c   Zhu, Z ^a   Zhang, Y ^a  

^a XIANGTAN UNIVERSITY   (China)

^b UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY   (China)

^c HUNAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AGILENT; ENERGY BAND; FINAL PRESSURE; INTERDIGITAL ELECTRODE; MAXIMUM SENSITIVITY; MEASUREMENT RANGE; OXYGEN CHEMISORPTION; PRESSURE SENSITIVE; SEMICONDUCTOR PARAMETERS; SINGLE NANOWIRES; VACUUM PRESSURE; ZNO; ZNO NANOWIRE ARRAYS;

CHEMISORPTION; NANOBELTS; NANOWIRES; PRESSURE SENSORS; VACUUM; ZINC OXIDE;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 80053499807     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/43/435501     Document Type: Article

References (26)

1. Djurisic A B, Ng A M C and Chen X Y 2010 Prog. Quantum Electron. 34 191
2. Huang M H, Mao S, Feick H, Yan H Q, Wu Y Y, Kind H, Weber E, Russo R and Yang P D 2001 Science 292 1897
3. He J H, Ho S T, Wu T B, Chen L J and Wang Z L 2007 Chem. Phys. Lett. 435 119
4. He J H and Ho C H 2007 Appl. Phys. Lett. 91 233105
5. Buchine B A, Hughes W L, Degertekin F L and Wang Z L 2006 Nano Lett. 6 1155
6. He H, Hsin C L, Liu J, Chen L J and Wang Z L 2007 Adv. Mater. 19 781
7. Wang J X, Sun X W, Yang Y, Huang H, Lee Y C, Tan O K and Vayssieres L 2006 Nanotechnology 17 4995
8. Wang Z L and Song J H 2006 Science 312 242
9. Berlicki T M 2001 Sensors Actuators A 93 27
10. Khosraviani K and Leung A M 2009 J. Micromech. Microeng. 19 045007
11. Wu L M, Song F F, Fang X X, Guo Z X and Liang S 2010 Nanotechnology 21 475502
12. Dong C K and Myneni G R 2004 Appl. Phys. Lett. 84 5443
13. He F, Huang Q A and Qin M 2007 Sensors Actuators A 135 507
14. Pelletier N, Beche B, Tahani N and Zyss J 2007 Sensors Actuators A 135 179
15. Chang S J, Hsueh T J, Hsu C L, Lin Y R, Chen I C and Huang B R 2008 Nanotechnology 19 095505
16. Hsueh T J, Hsu C L, Chang S J and Chen I C 2007 Sensors Actuators B 126 473
17. Zheng X J, Yang B, Zhang T, Jiang C B, Mao S X, Chen Y Q and Yuan B 2009 Appl. Phys. Lett. 95 221106
18. Zhang Y, Zheng X J, Zhang T, Gong L J, Dai S H and Chen Y Q 2010 Sensors Actuators B 147 180
19. Pan Z W, Dai Z R and Wang Z L 2001 Science 291 1947
20. Zheng X J, Chen Y Q, Zhang T, Yang B, Jiang C B, Yuan B and Zhu Z 2010 Sensors Actuators B 147 442
21. She J P M and Yeow J T W 2006 IEEE Sens. J. 6 1331
22. Salfi J, Philipose U, Sousa C F, Aouba S and Ruda H E 2006 Appl. Phys. Lett. 89 2611121
23. Schlenker E, Bakin A, Postels B, Mofor A C, Wehmann H H and Weimann T 2007 Phys. Status Solidi b 244 1473
24. Liu Y G, Feng P, Xue X Y, Shi S L, Fu X Q, Wang C, Wang Y G and Wang T H 2007 Appl. Phys. Lett. 90 042109
25. Li Q H, Gao T, Wang Y G and Wang T H 2005 Appl. Phys. Lett. 86 123117
26. Jie J S, Zhang W J, Jiang Y, Meng X M, Li Y Q and Lee S T 2006 Nano Lett. 6 1887