A silicon directly bonded capacitive absolute pressure sensor

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 507-514

  He, Fang ^a   Huang, Qing An ^a   Qin, Ming ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

Absolute pressure sensor; Capacitive; Silicon direct bonding

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; COMPUTER SOFTWARE; MICROSTRUCTURE; SILICON; SINGLE CRYSTALS;

ABSOLUTE PRESSURE SENSORS; SILICON DIRECT BONDING; THERMO COMPRESSION BONDING; VACUUM SEALED CAVITY;

PRESSURE SENSORS;

EID: 34047097523     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.09.022     Document Type: Article

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