Fabrication of multi-layer polymeric micro-sieve having narrow slot pores with conventional ultraviolet-lithography and micro-fabrication techniques

Biomicrofluidics

Volumn 5, Issue 3, 2011, Pages

  Ebrahimi Warkiani, Majid ^a   Lou, Chao Ping ^a   Gong, Hai Qing ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTORESISTS; POLYMERS; PORE SIZE; POTABLE WATER; SIEVES; SIGNAL TO NOISE RATIO;

COEFFICIENT OF VARIATION; CONVENTIONAL LITHOGRAPHY; DEVELOPING PROCESS; LOW CONCENTRATIONS; MICRO-FABRICATION TECHNIQUES; NARROW PORE SIZE DISTRIBUTIONS; ULTRAVIOLET LITHOGRAPHY; WATER-BORNE PATHOGENS;

FABRICATION;

EID: 80053455853     PISSN: 19321058     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3637630     Document Type: Article

References (28)

1. Peskoller C. Niessner R. Seidel M. Anal. Bioanal. Chem. 2009, 393:399. 10.1007/s00216-008-2381-5, and.
2. Floriano P.N. Christodoulides N. Romanovicz D. Bernard B. Simmons G.W. Cavell M. McDevitt J.T. Biosens. Bioelectron. 2005, 20:2079. 10.1016/j.bios.2004.08.046, and.
3. Noble R.T. Weisberg S.B. J. Water Health 2005, 3:381. and.
4. Quintero-Betancourt W. Peele E.R. Rose J.B. J. Microbiol. Methods 2002, 49:209. 10.1016/S0167-7012(02)00007-6, and.
5. Yang L. Bashir R. Biotechnol. Adv. 2008, 26:135. 10.1016/j.biotechadv.2007.10.003, and.
6. Dubitsky A. DeCollibus D. Ortolano G.A. J. Biochem. Biophys. Methods 2002, 51:47. 10.1016/S0165-022X(01)00243-3, and.
7. Wohlsen T. Bates J. Gray B. Katouli M. Appl. Environ. Microbiol. 2004, 70:2318. 10.1128/AEM.70.4.2318-2322.2004, and.
8. Kuiper S. Van Rijn C.J. M. Nijdam W. Elwenspoek M.C. J. Membr. Sci. 1998, 150:1. 10.1016/S0376-7388(98)00197-5, and.
9. Rijn C.J. M. Veldhuis G.J. Kuiper S. Nanotechnology 1998, 9:343. 10.1088/0957-4484/9/4/007, and.
10. Han K. Xu W. Ruiz A. Ruchhoeft P. Chellam S. J. Membr. Sci. 2005, 249:193. 10.1016/j.memsci.2004.09.044, and.
11. Yanagishita T. Nishio K. Masuda H. J. Vac. Sci. Technol. B 2007, 25:L35. 10.1116/1.2753847, and.
12. Saxena I. Agrawal A. Joshi S.S. J. Micromech. Microeng. 2009, 19:025025. 10.1088/0960-1317/19/2/025025, and.
13. Gironès M. Akbarsyah I.J. Nijdam W. Van Rijn C.J. M. Jansen H.V. Lammertink R.G. H. Wessling M. J. Membr. Sci. 2006, 283:411. 10.1016/j.memsci.2006.07.016, and.
14. Chen L. Warkiani M.E. Liu H.B. Gong H.Q. J. Micromech. Microeng. 2010, 20:075005. 10.1088/0960-1317/20/7/075005, and.
15. Campo A. Greiner C. J. Micromech. Microeng. 2007, 17:R81. 10.1088/0960-1317/17/6/R01, and.
16. Mata A. Fleischman A. Roy S. J. Micromech. Microeng. 2006, 16:276. 10.1088/0960-1317/16/2/012, and.
17. Kim K. Park D.S. Lu H.M. Che W. Lee J.B. Ahn C.H. J. Micromech. Microeng. 2004, 14:597. 10.1088/0960-1317/14/4/021, and.
18. Chang Y.J. Mohseni K. Bright V.M. Sens. Actuators, A 2007, 136(2):546. 10.1016/j.sna.2007.01.009, and.
19. Lin C. Lee G. Chang B. Chang G. J. Micromech. Microeng. 2002, 12:590. 10.1088/0960-1317/12/5/312, and.
20. Warkiani M.E. Chen L. Lou C.P. Liu H.B. Zhang R. Gong H.Q. J. Membr. Sci. 2011, 369:560. 10.1016/j.memsci.2010.12.038, and.
21. Voskerician G. Shive M.S. Shawgo R.S. Von Recum H. Anderson J.M. Cima M.J. Langer R. Biomaterials 2003, 24:1959. 10.1016/S0142-9612(02)00565-3, and.
22. Ramachandran V. Fogler H.S. J. Fluid Mech. 1999, 385:129. 10.1017/S0022112098004121, and.
23. Karim H. Sylvain S. Laurence L. Lucien H. Henry-Michel C. Water Sci. Technol. 2010, 62(1):196. 10.2166/wst.2010.311, and.
24. Nieminski E.C. Schaefer F. Ongerth J.E. Appl. Environ. Microbiol. 1995, 61(5):1714. and.
25. van Rijn C.J. M. Nano and Micro Engineered Membrane Technology 2004, 10. (Elsevier, Amsterdam, ), Vol.
26. Becker H. Locascio L.E. Talanta 2002, 56(2):267. 10.1016/S0039-9140(01)00594-X, and.
27. Wright D. Rajalingam B. Kar J. Selvarasah S. Ling Y. Yeh J. Langer R. Dokmeci M. Khademhosseini A. J. Biomed. Mater. Res. Part A 2008, 85:530. 10.1002/jbm.a.v85a:2, and.
28. Li J. Liu C. Dai X. Chen H. Liang Y. Sun H. Tian H. Ding X. J. Micromech. Microeng. 2008, 18:095021. 10.1088/0960-1317/18/9/095021, and.