Fabrication of microfilters using excimer laser micromachining and testing of pressure drop

Journal of Micromechanics and Microengineering

Volumn 19, Issue 2, 2009, Pages

  Saxena, Ishan ^a   Agrawal, Amit ^a   Joshi, Suhas S ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AIR FILTERS; COMPOSITE MICROMECHANICS; DROPS; EXCIMER LASERS; FLOW RATE; GAS LASERS; MICROFILTRATION; MICROMACHINING; PORE SIZE; PRESSURE DROP; REYNOLDS NUMBER; THICKNESS MEASUREMENT; ULTRASHORT PULSES;

AIR FLOWS; EXCIMER LASER MICROMACHINING; EXPERIMENTAL DATUM; HIGH RESOLUTIONS; HOLE DIAMETERS; LARGE DEVIATIONS; LOW REYNOLDS NUMBERS; MEAN PORE SIZES; MICRO-COMPONENTS; MICROFILTERS; NEW CORRELATIONS; OPENING RATIOS; POSITIVE CORRELATIONS; PRECISE CONTROLS; PRESSURE CURVES; SUB MICROMETERS; THERMAL DAMAGES;

FABRICATION;

EID: 61849137310     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/2/025025     Document Type: Article

References (18)

1. Yamazaki I M and Outi E Y 1994 Makrofol KG microfilters with large pores applied for the separation of two different liquid phases (emulsion) Radiat. Meas. 23 203-7
2. Belyakov N A, Voinov V A and Simbirtsev S A 1977 Blood microfilters Biomed. Eng. 11 331-6
3. Xing B and Jin Z 1999 Sorption of organic chemicals by microfilters J. Environ. Qual. 28 350-3
4. Basting D (ed) 2001 Excimer Laser Technology: Laser Sources, Optics, Systems and Applications (Göttingen: Lambda Physik) pp 177-80
5. Tseng A A, Chen Y T and Ma K J 2004 Fabrication of high-aspect-ratio microstructures using excimer laser Opt. Lasers Eng. 41 827-47
6. Choi K H, Meijer J, Masuzawa T and Kim D H 2004 Excimer laser micromachining for 3D microstructure J. Mater. Proc. Technol. 149 561-6
7. Naessens K, Ottevaere H, Daele P V and Baets R 2003 Flexible fabrication of microlenses in polymer layers with excimer laser ablation Appl. Surf. Sci. 208-209 159-64
8. Nikumb S, Chen Q, Li C, Reshef H, Zheng H Y, Qiu H and Low D 2005 Precision glass machining, drilling and profile cutting by short pulse lasers Thin Solid Films 477 216-21
9. Tokarev V N, Lopez J and Lazare S 2000 Modelling of high-aspect ratio microdrilling of polymers with UV laser ablation Appl. Surf. Sci. 168 75-8
10. Wu C Y and Shu C W 2006 Effects of excimer laser illumination on microdrilling into an oblique polymer surface Opt. Lasers Eng. 44 842-57
11. Hasegawa T, Suganuma M and Watanabe H 1997 Anomaly of excess pressure drops of the flow through very small orifices Phys. Fluids 9 1
12. Hsiai T K, Cho S K, Yang J M, Yang X, Tai Y C and Ho C M 2002 Pressure drops of water flow through micromachined particle filters J. Fluids Eng. 124 1053-6
13. Yang X, Yang J M, Tai Y C and Ho C M 1999 Micromachined membrane particle filters Sensors Actuators 73 184-91
14. Ramamurthi K and Nandakumar K 1999 Characteristics of flow through small sharp-edged cylindrical orifices Flow Meas. Instrum. 10 133-43
15. Kirsh A A and Spurny K R 1969 Gas flow in nucleoporous filters Zh. Prikl. Mekh. Tekh. Fiz. 10 109-12
16. Agrawal A and Prabhu S V 2008 Survey on measurement of tangential momentum accommodation coefficient J. Vac. Sci. Technol. A 26 634-45
17. Yang J M, Yang X, Ho C M and Tai Y C 2001 Micromachined particle filter with low power dissipation J. Fluids Eng. 123 899-908
18. Mott D R, Oran E S and Kaplan C R 2001 Microfilter simulations and scaling law AIAA J. Thermophys. Heat Transfer 15 473-7