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Volumn 257, Issue 24, 2011, Pages 10499-10502
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Studies on the structural and electrical properties of F-doped SnO 2 film prepared by APCVD
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Author keywords
Crystal structure; Electrical properties; Photoelectron spectroscopy; Thin films; Vapor deposition
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Indexed keywords
CALCIUM COMPOUNDS;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL IMPURITIES;
CRYSTAL STRUCTURE;
ELECTRIC PROPERTIES;
FILM GROWTH;
GRAIN BOUNDARIES;
GRAIN GROWTH;
HALL MOBILITY;
NANOCOMPOSITES;
PHOTOELECTRON SPECTROSCOPY;
PHOTOELECTRONS;
PHOTONS;
SILICON COMPOUNDS;
SODIUM COMPOUNDS;
THIN FILMS;
TIN OXIDES;
VAPOR DEPOSITION;
X RAY PHOTOELECTRON SPECTROSCOPY;
ABNORMAL GRAIN GROWTH;
ATMOSPHERE PRESSURE CHEMICAL VAPOR DEPOSITIONS;
DIFFUSION BARRIER LAYERS;
ELEMENT DISTRIBUTION;
FLUORINE-DOPED TIN OXIDE FILMS;
GRAIN BOUNDARY SCATTERING;
IONIZED IMPURITY SCATTERING;
STRUCTURAL AND ELECTRICAL PROPERTIES;
OXIDE FILMS;
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EID: 80052955701
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2011.07.025 Document Type: Article |
Times cited : (43)
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References (16)
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