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Volumn 5, Issue 5, 2011, Pages 505-509
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A photothermal microscopy investigation of carrier transport in ion implanted silicon thin films under the action of external electric field
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Author keywords
Carrier transport; Implanted silicon thin films; Photothermal microscopy
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Indexed keywords
CARRIER TRANSPORT;
ELECTRIC FIELDS;
MICROELECTRONICS;
SILICON;
EXTERNAL ELECTRIC FIELD;
ION-IMPLANTED SILICON;
MICROELECTRONIC CIRCUITS;
ONE-DIMENSIONAL MODEL;
PHOTOTHERMAL MICROSCOPY;
PHOTOTHERMAL SIGNALS;
SENSITIVE TECHNIQUES;
SILICON THIN FILM;
THIN FILMS;
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EID: 80052519356
PISSN: 18426573
EISSN: 20653824
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (2)
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References (18)
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