Chapter 4 Photomodulated Thermoreflectance Investigation of Implanted Wafers. Annealing Kinetics of Defects

Semiconductors and Semimetals

Volumn 46, Issue C, 1997, Pages 115-150

  Christofides, Constantinos ^a  

^a UNIVERSITY OF CYPRUS   (Cyprus)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING KINETICS; IMPLANTED WAFERS; THERMOREFLECTANCE;

EID: 13044302065     PISSN: 00808784     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S0080-8784(08)60107-6     Document Type: Article

References (68)

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