Structural and magnetic properties of Mn-doped anatase TiO2 films synthesized by atomic layer deposition

Applied Physics A: Materials Science and Processing

Volumn 104, Issue 2, 2011, Pages 583-586

  Sellers, Meredith C K ^a   Seebauer, Edmund G ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALD PRECURSOR; ANATASE TIO; CHEMICAL STATE; CRYSTALLINITIES; DOPANT SOURCES; FIELD-DEPENDENT MAGNETIZATION; FILM COMPOSITION; MATRIX; MN-DOPED; PROCESS THROUGHPUT; ROOM-TEMPERATURE FERROMAGNETISM; SI(1 0 0); STRUCTURAL AND MAGNETIC PROPERTIES; TIO; X RAY REFLECTIVITY;

ATOMIC LAYER DEPOSITION; DOPING (ADDITIVES); MAGNETIC FIELDS; MAGNETIC PROPERTIES; MANGANESE; MICROSTRUCTURE; PHOTOELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

TITANIUM DIOXIDE;

EID: 80052498557     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-011-6308-1     Document Type: Article

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