Exploring capacitance-voltage measurements to find the piezoelectric coefficient of aluminum nitride

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2011, Pages 69-73

  Van Hemert, T ^a   Sarakiotis, D ^a   Jose, S ^a   Hueting, R J E ^a   Schmitz, J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS DEPENDENCE; BULK ACOUSTIC WAVES; CAPACITANCE MODEL; CAPACITANCE VOLTAGE; CAPACITANCE VOLTAGE MEASUREMENTS; LAYER THICKNESS; PIEZOELECTRIC COEFFICIENT; SWEEP DIRECTIONS;

ACOUSTIC RESONATORS; ACOUSTICS; ALUMINUM; ALUMINUM NITRIDE; BIAS VOLTAGE; CAPACITANCE; CAPACITORS; MICROELECTRONICS; NITRIDES;

PIEZOELECTRICITY;

EID: 80052410022     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2011.5976862     Document Type: Conference Paper

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