Piezoelectric coefficients of thin film aluminum nitride characterizations using capacitance measurements

IEEE Microwave and Wireless Components Letters

Volumn 19, Issue 3, 2009, Pages 140-142

  Al Ahmad, Mahmoud ^a   Plana, Robert ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

Aluminum nitride (AIN); Characterizations; Dimensional variation; Material parameters; Piezoelectric material

Indexed keywords

ALUMINA; ALUMINUM; CAPACITANCE; CAPACITANCE MEASUREMENT; MATERIALS; MEMS; NITRIDES; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; THIN FILM DEVICES; THIN FILMS;

ALN; ALN FILMS; BIAS CONDITIONS; CHARGE CONSTANTS; DETERMINATION OF ALUMINUMS; DIMENSIONAL VARIATION; GEOMETRICAL DIMENSIONS; MATERIAL PARAMETERS; MEMS DEVICES; PARALLEL PLATES; PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC THIN FILMS; THIN FILM ALUMINUMS;

ALUMINUM NITRIDE;

EID: 62449233216     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2009.2013682     Document Type: Article

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