Vibration-driven MEMS energy harvester with vacuum UV-charged vertical electrets

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2630-2633

  Yamashita, K ^a,b   Honzumi, M ^a,b   Hagiwara, K ^a,c   Iguchi, Y ^c   Suzuki, Y ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b BEANS Project   (Japan)

^c Japan Broadcasting Corporation   (Japan)

Author keywords

KFM; MEMS generator; Parylene; Vacuum UV; Vertical electrets

Indexed keywords

KFM; MEMS GENERATOR; PARYLENE; VACUUM UV; VERTICAL ELECTRETS;

ACTUATORS; ENERGY HARVESTING; MICROSYSTEMS; SOLID-STATE SENSORS; VACUUM; VACUUM APPLICATIONS; VACUUM TRANSDUCERS;

ELECTRETS;

EID: 80052135333     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969870     Document Type: Conference Paper

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