FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1160-1163

  Phan, D T ^a   Chung, G S ^a  

^a University of Ulsan   (South Korea)

Author keywords

FEM modeling; humidity sensor; SAW sensor

Indexed keywords

ALN; FEM MODELING; FINITE ELEMENT METHOD SIMULATION; FREQUENCY SHIFT; HUMIDITY ABSORPTION; PIEZOELECTRIC THIN FILMS; POLYCRYSTALLINE ZINC OXIDES; PRESENCE OF WATER; PROPAGATION CHARACTERISTICS; SAW RESONATORS; SAW SENSOR; SAW SENSORS; SURFACE ACOUSTIC WAVES; ZNO; ZNO FILMS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC TRANSDUCERS; ACOUSTIC WAVES; ACOUSTICS; ACTUATORS; ALUMINUM NITRIDE; EXPERIMENTS; FINITE ELEMENT METHOD; HUMIDITY SENSORS; MICROSYSTEMS; NITRIDES; WATER ABSORPTION; WATER VAPOR; ZINC OXIDE;

SOLID-STATE SENSORS;

EID: 80052126453     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969239     Document Type: Conference Paper

References (11)

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