Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol-gel derived nanocrystalline zinc oxide film

Sensors and Actuators, B: Chemical

Volumn 148, Issue 2, 2010, Pages 347-352

  Hong, Hoang Si ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

AlN thin film; Nanocrystalline ZnO; SAW humidity sensor; Sol gel

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ALUMINUM NITRIDE; ATMOSPHERIC HUMIDITY; FREQUENCY RESPONSE; HUMIDITY SENSORS; II-VI SEMICONDUCTORS; III-V SEMICONDUCTORS; NANOCRYSTALS; OXIDE FILMS; PARTICLE SIZE; SILICON COMPOUNDS; SOL-GEL PROCESS; ZINC OXIDE; ZINC SULFIDE;

ALN THIN FILMS; ALUMINUM NITRIDE (ALN); ENVIRONMENTAL TEMPERATURE; HEXAGONAL WURTZITE STRUCTURE; NANOCRYSTALLINE ZNO; REACTIVE MAGNETRON SPUTTERING; RELATIVE HUMIDITY CHANGES; SURFACE ACOUSTIC WAVE (SAW);

THIN FILMS;

EID: 77955309934     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.05.002     Document Type: Letter

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