Effect of thermal annealing on the SAW properties of AIN films deposited on si substrate

Journal of the Korean Physical Society

Volumn 54, Issue 4, 2009, Pages 1519-1525

  Hong, Hoang Si ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

Ain; Annealing; Geometry; Insertion loss; Surface morphology; Two port SAW resonator

Indexed keywords

EID: 65649130815     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: 10.3938/jkps.54.1519     Document Type: Article

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