Experiment and theoretical analysis of relative humidity sensor based on film bulk acoustic-wave resonator

Sensors and Actuators, B: Chemical

Volumn 147, Issue 2, 2010, Pages 381-384

  Qiu, Xiaotun ^a   Tang, Rui ^a   Zhu, Jie ^a   Oiler, Jonathon ^b   Yu, Cunjiang ^a   Wang, Ziyu ^b   Yu, Hongyu ^a,b  

^a Arizona State University   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Film bulk acoustic wave resonator; Mass loading; Power law; Relative humidity; ZnO

Indexed keywords

FILM BULK ACOUSTIC-WAVE RESONATORS; MASS LOADINGS; POWER LAW; RELATIVE HUMIDITIES; ZNO;

ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; LOADING; NATURAL FREQUENCIES; RESONATORS; ZINC OXIDE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 77953133891     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.04.012     Document Type: Letter

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