Heated membranes prevent clogging of apertures in nanostencil lithography

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 998-1001

  Xie, S Q ^a   Savu, V ^a   Brugger, J ^a  

^a EPFL   (Switzerland)

Author keywords

clogging; embedded electrodes; heated membranes; microhotplate; Stencil lithography

Indexed keywords

CLOGGING; EMBEDDED ELECTRODES; HEATED MEMBRANES; MICRO HOTPLATE; STENCIL LITHOGRAPHY;

ACTUATORS; FINITE ELEMENT METHOD; LITHOGRAPHY; MICROSYSTEMS; PLATINUM; SOLID-STATE SENSORS;

MEMBRANES;

EID: 80052116770     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969501     Document Type: Conference Paper

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