Micro to nano scale thermal energy conduction in semiconductor thin films

Journal of Applied Physics

Volumn 110, Issue 3, 2011, Pages

  Maldovan, Martin ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY CONDUCTION; EXPERIMENTAL MEASUREMENTS; LENGTH SCALE; MODEL-BASED OPC; NANO SCALE; NANO-SCALE MATERIALS; PHONON MEAN FREE PATH; PHONON-BOUNDARY SCATTERING; PROPAGATION DIRECTION; SEMICONDUCTOR THIN FILMS; SPATIAL LOCATION; THEORETICAL STUDY; THERMOELECTRIC MATERIAL; TRANSPORT PROCESS;

GERMANIUM; OPTOELECTRONIC DEVICES; PHONONS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR INSULATOR BOUNDARIES; SURFACE ROUGHNESS; THERMAL ENERGY; THERMOELECTRICITY; THIN FILMS;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 80051931009     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3607295     Document Type: Article

References (29)

1. D. G. Cahill, W. K. Ford, K. E. Goodson, G. D. Mahan, A. Majumdar, H. J. Maris, R. Merlin, and S. R. Phillpot, J. Appl. Phys. 93, 793 (2003). 10.1063/1.1524305
2. R. Venkatasubramanian, E. Siivola, T. Colpitts, and B. O'Quinn, Nature 413, 597 (2001). 10.1038/35098012 (Pubitemid 32964053)
3. M. Asheghi, Y. K. Leung, S. S. Wong, and K. E. Goodson, Appl. Phys. Lett. 71, 1798 (1997). 10.1063/1.119402
4. Y. S. Ju and K. E. Goodson, Appl. Phys. Lett. 74, 3005 (1999). 10.1063/1.123994
5. W. Liu and M. Asheghi, Appl. Phys. Lett. 84, 3819 (2004). 10.1063/1.1741039
6. K. E. Goodson and Y. S. Ju, Annu. Rev. Mater. Sci. 29, 261 (1999). 10.1146/annurev.matsci.29.1.261
7. M. Asheghi, M. N. Touzelbaev, K. E. Goodson, Y. K. Leung, and S. S. Wong, J. Heat Transfer 120, 30 (1998). 10.1115/1.2830059
8. J. M. Ziman, Electrons and Phonons (Cambridge University Press, London, 2001).
9. J. Callaway, Phys. Rev. 113, 1046 (1959). 10.1103/PhysRev.113.1046
10. M. G. Holland, Phys. Rev. 132, 2461 (1963). 10.1103/PhysRev.132.2461
11. N. Mingo, Phys. Rev. B 68, 113308 (2003). 10.1103/PhysRevB.68.113308
12. N. Mingo, L. Yang, D. Li, and A. Majumdar, Nanoletters 3, 1713 (2003).
13. P. Chantrenne, J. L. Barrat, X. Blase, and J. D. Gale, J. Appl. Phys. 97, 104318 (2005) 10.1063/1.1898437 (Pubitemid 40866128)
14. A. Majumdar, J. Heat Transfer 115, 7 (1993). 10.1115/1.2910673
15. G. Chen, Phys. Rev. B 57, 14958 (1998). 10.1103/PhysRevB.57.14958
16. W. Liu and M. Asheghi, J. Heat. Transf. 128, 75 (2006). 10.1115/1.2130403
17. J. E. Turney, A. J. H. McGaughey, and C. H. Amon, J. Appl. Phys. 107, 024317 (2010). 10.1063/1.3296394
18. D. Baillis and J. Randrianalisoa, Int. J. Heat Transf. 52, 2516 (2009). 10.1016/j.ijheatmasstransfer.2009.01.017
19. J. D. Chung, A. J. H. McGaughey, and M. Kaviany, J. Heat Transf. 126, 376 (2004). 10.1115/1.1723469 (Pubitemid 38964474)
20. C. R. Tellier and A. J. Tosser, Size Effects in Thin Films (Elsevier, New York, 1983).
21. R. A. H. Hamilton and J. E. Parrott, Phys. Rev. 178, 1284 (1969). 10.1103/PhysRev.178.1284
22. C. Kittel, Introduction to Solid State Physics (Wiley, New York, 2005).
23. N. W. Ashcroft and N. D. Mermin, Solid State Physics (Saunders College, New York, 1976).
24. J. E. Parrot and A. D. Stuckes, Thermal Conductivity of Solids (Pion Limited, London, 1975).
25. R. A. H. Hamilton and J. E. Parrott, Phys. Rev. 178, 1284 (1969). 10.1103/PhysRev.178.1284
26. R. Hull, Properties of Crystalline Silicon (INSPEC, London, 1999).
27. S. Adachi, Handbook on Physical Properties of Semiconductors: Group IV Semiconductors Vol. 1 (Kluwer Academic Publishers, Norwell, MA, USA, 2004).
28. S. B. Soffer, J. Appl. Phys. 38, 1710 (1967). 10.1063/1.1709746
29. W. Kim, J. Zide, A. Gossard, D. Klenov, S. Stemmer, A. Shakouri, and A. Majumdar, Phys. Rev. Lett. 96, 045901 (2006). 10.1103/PhysRevLett.96.045901 (Pubitemid 43270882)