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Journal of Vacuum Science and Technology B

Volumn 29, Issue 4, 2011, Pages

Controlled formation of atomic step morphology on micropatterned Si (100)

(7) Li, K a,b Pradeep, N b Chikkamaranahalli, S b Stan, G b Attota, R b Fu, J b Silver, R b

a UNIVERSITY OF MARYLAND (United States)

b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY;

CONVENTIONAL OPTICAL MICROSCOPES; HIGH-TEMPERATURE PROCESSING; LITHOGRAPHIC PATTERNS; MICROMETER SCALE; MONTE CARLO MODEL; NANOSCALE FEATURES; POST PROCESSING; TERRACE MORPHOLOGY;

MORPHOLOGY;

EID: 80051881650 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3610955 Document Type: Article

Times cited : (13)

References (20)

1
- 0037055571
- Design of Si surfaces for self-assembled nanoarchitecture
- DOI 10.1016/S0039-6028(02)01600-X, PII S003960280201600X
- T. Ogino, Surf. Sci. 0039-6028 514, 1 (2002). 10.1016/S0039-6028(02) 01600-X (Pubitemid 34814160)
- (2002) Surface Science , vol.514 , Issue.1-3 , pp. 1-9
- Ogino, T.¹ Homma, Y.² Kobayashi, Y.³ Hibino, H.⁴ Prabhakaran, K.⁵ Sumitomo, K.⁶ Omi, H.⁷ Suzuki, S.⁸ Yamashita, T.⁹ Bottomley, D.J.¹⁰ Ling, F.¹¹ Kaneko, A.¹²

2
- 0033702416
- 0957-4484, 10.1088/0957-4484/11/2/306
- M. C. Hersam, N. P. Guisinger, and J. W. Lyding, Nanotechnology 0957-4484 11, 70 (2000). 10.1088/0957-4484/11/2/306
- (2000) Nanotechnology , vol.11 , pp. 70
- Hersam, M.C.¹ Guisinger, N.P.² Lyding, J.W.³

3
- 72849140981
- 1071-1023, 10.1116/1.3237096
- J. N. Randall, J. W. Lyding, S. Schmucker, J. R. Von Ehr, J. Ballard, R. Saini, H. Xu, and Y. Ding, J. Vac. Sci. Technol. B 1071-1023 27, 2764 (2009). 10.1116/1.3237096
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 2764
- Randall, J.N.¹ Lyding, J.W.² Schmucker, S.³ Von Ehr, J.R.⁴ Ballard, J.⁵ Saini, R.⁶ Xu, H.⁷ Ding, Y.⁸

4
- 0037896275
- 0031-9007, 10.1103/PhysRevLett.72.1678
- D. Kandel and J. D. Weeks, Phys. Rev. Lett. 0031-9007 72, 1678 (1994). 10.1103/PhysRevLett.72.1678
- (1994) Phys. Rev. Lett. , vol.72 , pp. 1678
- Kandel, D.¹ Weeks, J.D.²

5
- 0001162919
- 0003-6951, 10.1063/1.119083
- G. D. Wilk, Y. Wei, H. Edwards, and R. M. Wallace, Appl. Phys. Lett. 0003-6951 70, 2288 (1997). 10.1063/1.119083
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2288
- Wilk, G.D.¹ Wei, Y.² Edwards, H.³ Wallace, R.M.⁴

6
- 34548668007
- Step-mediated size selection and ordering of heteroepitaxial nanocrystals
- DOI 10.1088/0957-4484/18/33/335304, PII S0957448407481740
- I. Goldfarb, Nanotechnology 0957-4484 18, 335304 (2007). 10.1088/0957-4484/18/33/335304 (Pubitemid 47413464)
- (2007) Nanotechnology , vol.18 , Issue.33 , pp. 335304
- Goldfarb, I.¹

7
- 36849013435
- An atomic resolution scanning tunneling microscope that applies external tensile stress and strain in an ultrahigh vacuum
- DOI 10.1088/0957-4484/19/02/025705, PII S0957448408616438
- D. Fujita, M. Kitahara, K. Onishi, and K. Sagisaka, Nanotechnology 0957-4484 19, 025705 (2008). 10.1088/0957-4484/19/02/025705 (Pubitemid 350234602)
- (2008) Nanotechnology , vol.19 , Issue.2 , pp. 025705
- Fujita, D.¹ Kitahara, M.² Onishi, K.³ Sagisaka, K.⁴

8
- 0001733413
- 0003-6951, 10.1063/1.117422
- S. Tanaka, C. C. Umbach, J. M. Blakely, R. M. Tromp, and M. Mankos, Appl. Phys. Lett. 0003-6951 69, 1235 (1996). 10.1063/1.117422
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1235
- Tanaka, S.¹ Umbach, C.C.² Blakely, J.M.³ Tromp, R.M.⁴ Mankos, M.⁵

9
- 0033892291
- Formation and stability of large step-free areas on Si(001) and Si(111)
- DOI 10.1016/S0039-6028(99)01034-1
- D. Lee and J. M. Blakely, Surf. Sci. 0039-6028 445, 32 (2000). 10.1016/S0039-6028(99)01034-1 (Pubitemid 30535828)
- (2000) Surface Science , vol.445 , Issue.1 , pp. 32-40
- Lee, D.¹ Blakely, J.²

10
- 0035396474
- Step bunching, step wandering and faceting: Self-organization at Si surfaces
- DOI 10.1016/S0167-5729(01)00013-9, PII S0167572901000139
- K. Yagi, H. Minoda, and M. Degawa, Surf. Sci. Rep. 0167-5729 43, 45 (2001). 10.1016/S0167-5729(01)00013-9 (Pubitemid 32624349)
- (2001) Surface Science Reports , vol.43 , Issue.2-4 , pp. 45-126
- Yagi, K.¹ Minoda, H.² Degawa, M.³

11
- 56249125941
- 0167-5729, 10.1016/S0167-5729(98)00010-7
- H. C. Jeong and E. D. Williams, Surf. Sci. Rep. 0167-5729 34, 171 (1999). 10.1016/S0167-5729(98)00010-7
- (1999) Surf. Sci. Rep. , vol.34 , pp. 171
- Jeong, H.C.¹ Williams, E.D.²

12
- 35949008471
- 0031-9007, 10.1103/PhysRevLett.61.1973
- O. L. Alerhand, D. Vanderbilt, R. D. Meade, and J. D. Joannopoulos, Phys. Rev. Lett. 0031-9007 61, 1973 (1988). 10.1103/PhysRevLett.61.1973
- (1988) Phys. Rev. Lett. , vol.61 , pp. 1973
- Alerhand, O.L.¹ Vanderbilt, D.² Meade, R.D.³ Joannopoulos, J.D.⁴

13
- 0026170685
- Anisotropy in surface migration of Si and Ge on Si(001)
- DOI 10.1016/0039-6028(91)91177-Y
- Y. W. Mo and M. G. Lagally, Surf. Sci. 0039-6028 248, 313 (1991). 10.1016/0039-6028(91)91177-Y (Pubitemid 21683185)
- (1991) Surface Science , vol.248 , Issue.3 , pp. 313-320
- Mo, Y.-W.¹ Lagally, M.G.²

14
- 0037153662
- On the microscopic origin of the kinetic step bunching instability on vicinal Si( 0 0 1 )
- DOI 10.1016/S0039-6028(02)02273-2, PII S0039602802022732
- J. Myslivecek, C. Schelling, F. Schäffler, G. Springholz, P. Šmilauer, J. Krug, and B. Voigtländer, Surf. Sci. 0039-6028 520, 193 (2002). 10.1016/S0039-6028(02)02273-2 (Pubitemid 35420970)
- (2002) Surface Science , vol.520 , Issue.3 , pp. 193-206
- Myslivecek, J.¹ Schelling, C.² Schaffler, F.³ Springholz, G.⁴ Smilauer, P.⁵ Krug, J.⁶ Voigtlander, B.⁷

15
- 0001523950
- 0021-3640
- A. V. Latyshev, A. B. Krasil'nikov, A. L. Aseev, and S. I. Stenin, JETP Lett. 0021-3640 48, 526 (1988).
- (1988) JETP Lett. , vol.48 , pp. 526
- Latyshev, A.V.¹ Krasil'Nikov, A.B.² Aseev, A.L.³ Stenin, S.I.⁴

16
- 3342924439
- 0031-9007, 10.1103/PhysRevLett.64.2406
- O. L. Alerhand, A. N. Berker, J. D. Joannopoulos, D. Vanderbilt, R. J. Hamers, and J. E. Demuth, Phys. Rev. Lett. 0031-9007 64, 2406 (1990). 10.1103/PhysRevLett.64.2406
- (1990) Phys. Rev. Lett. , vol.64 , pp. 2406
- Alerhand, O.L.¹ Berker, A.N.² Joannopoulos, J.D.³ Vanderbilt, D.⁴ Hamers, R.J.⁵ Demuth, J.E.⁶

17
- 84905948967
- The dimensions are obtained from AFM topography measurements
- The dimensions are obtained from AFM topography measurements.

18
- 0035968798
- 0031-9007, 10.1103/PhysRevLett.87.186102
- K. Thürmer, J. E. Reutt-Robey, E. D. Williams, M. Uwaha, A. Emundts, and H. P. Bonzel, Phys. Rev. Lett. 0031-9007 87, 186102 (2001). 10.1103/PhysRevLett.87.186102
- (2001) Phys. Rev. Lett. , vol.87 , pp. 186102
- Thürmer, K.¹ Reutt-Robey, J.E.² Williams, E.D.³ Uwaha, M.⁴ Emundts, A.⁵ Bonzel, H.P.⁶

19
- 4243823469
- 0031-9007, 10.1103/PhysRevLett.80.1268
- F. Liu, J. Tersoff, and M. G. Lagally, Phys. Rev. Lett. 0031-9007 80, 1268 (1998). 10.1103/PhysRevLett.80.1268
- (1998) Phys. Rev. Lett. , vol.80 , pp. 1268
- Liu, F.¹ Tersoff, J.² Lagally, M.G.³

20
- 0036530481
- Step bunching induced by drift of adatoms with anisotropic surface diffusion
- DOI 10.1016/S0022-0248(01)01847-4, PII S0022024801018474
- M. Sato, M. Uwaha, and Y. Saito, J. Cryst. Growth 0022-0248 237-239, 43 (2002). 10.1016/S0022-0248(01)01847-4 (Pubitemid 34544220)
- (2002) Journal of Crystal Growth , vol.237-239 , Issue.1-4 , pp. 43-46
- Sato, M.¹ Uwaha, M.² Saito, Y.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.