Dissipation in single crystal diamond micromechanical annular plate resonators

Diamond and Related Materials

Volumn 20, Issue 8, 2011, Pages 1204-1207

  Ray, Matthew P ^a   Feygelson, Tatyana I ^b   Butler, James E ^a   Baldwin, Jeffrey W ^a   Houston, Brian H ^a   Pate, Bradford B ^a   Zalalutdinov, Maxim K ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

^b SCIENCE APPLICATIONS INTERNATIONAL CORPORATION   (United States)

Author keywords

Fabrication; Ion Implantation; MEMS; NEMS; Sacrificial Layer

Indexed keywords

ANNULAR PLATE; MAGNITUDE REDUCTION; MICRO-MECHANICAL; ROOM TEMPERATURE; SACRIFICIAL LAYER; SINGLE CRYSTAL DIAMOND;

ENERGY DISSIPATION; ION IMPLANTATION; SINGLE CRYSTALS;

RESONATORS;

EID: 80051790299     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.06.016     Document Type: Article

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