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Volumn 956, Issue , 2007, Pages 25-30

Lift-off process to get free-standing high quality single crystal diamond films and suspended single crystal diamond devices

Author keywords

[No Author keywords available]

Indexed keywords

LIFT-OFF PROCESS; SINGLE CRYSTAL DIAMOND DEVICES; SINGLE CRYSTAL DIAMOND FILMS; SUBSURFACE DAMAGE;

EID: 40949127047     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (12)
  • 1
    • 0004145752 scopus 로고
    • Sze S M ed, 2nd ed, New York: Wiley
    • Sze S M (ed), Physics of Semiconductor Devices 2nd ed. (New York: Wiley, 1981) p 849.
    • (1981) Physics of Semiconductor Devices , pp. 849
  • 9
    • 40949119388 scopus 로고    scopus 로고
    • and proceedings MRS 04 Falls meeting 829, B7.2.1(2005)
    • and proceedings MRS 04 Falls meeting vol. 829, B7.2.1(2005)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.