SCOPUS 정보 검색 플랫폼

Ultramicroscopy

Volumn 111, Issue 6, 2011, Pages 530-534

Atom probe analysis of a 3D finFET with high-k metal gate

(4) Gilbert, M a,b Vandervorst, W a,b Koelling, S a,b Kambham, A K a,b

a IMEC (Belgium)

b UNIVERSITY OF LEUVEN (Belgium)

Author keywords

Atom probe High k metal gate finFET 3D reconstruction accuracy

Indexed keywords

ATOMS; FINFET; IMAGE RECONSTRUCTION; PROBES;

3D RECONSTRUCTION; ATOM PROBE ANALYSIS; GATE STACKS; HETEROGENEOUS STRUCTURES; HIGH-K METAL GATES; MEASUREMENT RELIABILITIES; METAL GATE;

HIGH-K DIELECTRIC;

BORON; METAL; SILICON; TITANIUM;

ACCURACY; ALGORITHM; ARTICLE; ARTIFACT; ATOM PROBE TOMOGRAPHY; CHEMICAL STRUCTURE; CONTROLLED STUDY; DIELECTRIC CONSTANT; QUANTITATIVE ANALYSIS; SEMICONDUCTOR; TOMOGRAPHY;

EID: 80051774838 PISSN: 03043991 EISSN: 18792723 Source Type: Journal
DOI: 10.1016/j.ultramic.2010.12.025 Document Type: Article

Times cited : (42)

References (20)

1
- 0032255808
- D. Hisamoto, W.-C. Lee, J. Kedzierski, E. Anderson, H. Takeuchi, K. Asano, T.-J. King, J. Bokor, C. Hu, IEDM Tech. Dig. (1998) 1032-1034.
- (1998) IEDM Tech. Dig. , pp. 1032-1034
- Hisamoto, D.¹ Lee, W.-C.² Kedzierski, J.³ Anderson, E.⁴ Takeuchi, H.⁵ Asano, K.⁶ King, T.-J.⁷ Bokor, J.⁸ Hu, C.⁹

2
- 85030577468
- C.M. Garner, E.M. Vogel, IEEE Trans. Semicond. Manuf. 19 (4).
- IEEE Trans. Semicond. Manuf. , vol.19 , Issue.4
- Garner, C.M.¹ Vogel, E.M.²

3
- 85014431411
- W. vandervorst, J.L Everaert, E. Rosseel, M. Jurczack, T. Hoffman, P. Eyben, J. Mody, G. Zschatzsch, S. Koelling, M. Gilbert, T. Poon, J. del. Agua Borniquel, M. Foad, R. Duffy, B.J. Pawlak, AIP Conf. Proc. 1066 (2008) 449-456.
- (2008) AIP Conf. Proc , vol.1066 , pp. 449-456
- vandervorst, W.¹ Everaert, J.L.² Rosseel, E.³ Jurczack, M.⁴ Hoffman, T.⁵ Eyben, P.⁶ Mody, J.⁷ Zschatzsch, G.⁸ Koelling, S.⁹ Gilbert, M.¹⁰ Poon, T.¹¹ del Agua Borniquel, J.¹² Foad, M.¹³ Duffy, R.¹⁴ Pawlak, B.J.¹⁵

4
- 80052518129
- J. Mody, R. Duffy, P. Eyben, J. Goossens, A. Moussa, W. Polspoel, B. Berghmans, M.J.H. Van Dal, B.J. Pawlak, M. Kaiser, R.G.R. Weemaes, W. Vandervorst, J. Vac. Sci. Technol. B 28 (2010).
- (2010) J. Vac. Sci. Technol. B , vol.28
- Mody, J.¹ Duffy, R.² Eyben, P.³ Goossens, J.⁴ Moussa, A.⁵ Polspoel, W.⁶ Berghmans, B.⁷ Van Dal, M.J.H.⁸ Pawlak, B.J.⁹ Kaiser, M.¹⁰ Weemaes, R.G.R.¹¹ Vandervorst, W.¹²

5
- 36048945570
- D. Blavette, B. Deconihout,A. Bostel,J.M. Sarrau, M. Bouet, A. Menand, Rev. Sci. Instrum. 64 (1993) 2911-2918.
- (1993) Rev. Sci. Instrum. , vol.64 , pp. 2911-2918
- Blavette, D.¹ Deconihout, B.² Bostel, A.³ Sarrau, J.M.⁴ Bouet, M.⁵ Menand, A.⁶

6
- 33646392741
- B. Gault, F. Vurpillot, A. Vella, M. Gilbert, A. Menand, D. Blavette, B. Deconihout, Rev. Sci. Instrum. 77 (2006) 043705.
- (2006) Rev. Sci. Instrum. , vol.77 , pp. 043705
- Gault, B.¹ Vurpillot, F.² Vella, A.³ Gilbert, M.⁴ Menand, A.⁵ Blavette, D.⁶ Deconihout, B.⁷

7
- 56449109533
- P. Ronsheim, P. Flaitz, M. Hatzistergos, C. Molella, K. Thompson, R. Alvis, Appl. Surf. Sci. 255 (2008) 1547-1550.
- (2008) Appl. Surf. Sci. , vol.255 , pp. 1547-1550
- Ronsheim, P.¹ Flaitz, P.² Hatzistergos, M.³ Molella, C.⁴ Thompson, K.⁵ Alvis, R.⁶

8
- 70350113660
- Y. Shimizu, Y. Kawamura, M. Uematsu, K.M. Itoh, M. Tomita, M. Sasaki, H. Uchida, M. Takahashi, J. Appl. Phys. 106 (2009) 076102.
- (2009) J. Appl. Phys. , vol.106 , pp. 076102
- Shimizu, Y.¹ Kawamura, Y.² Uematsu, M.³ Itoh, K.M.⁴ Tomita, M.⁵ Sasaki, M.⁶ Uchida, H.⁷ Takahashi, M.⁸

9
- 34548825634
- K. Hoummada, D. Mangelinck, E. Cadel, D. CPerrin-Pellegrino, Blavette, B. Deconihout, Microelectron. Eng. 84 (11) (2007) 2517-2522.
- (2007) Deconihout, Microelectron. Eng. , vol.84 , Issue.11 , pp. 2517-2522
- Hoummada, K.¹ Mangelinck, D.² Cadel, E.³ CPerrin-Pellegrino, D.⁴ Blavette, B.⁵

10
- 0003513853
- Oxford
- M. Miller, A. Cerezo, M. Hetherington, G. Smith, Atom Probe Field Ion Microscopy Clarendon, Oxford, 1996.
- (1996) Atom Probe Field Ion Microscopy Clarendon
- Miller, M.¹ Cerezo, A.² Hetherington, M.³ Smith, G.⁴

11
- 0032103057
- D.J. Larson, M.K. Miller, R.M. Ulfig, R.J. Matyi, P.P. Camus, T.T. Kelly, Ultra-microscopy 73 (1998) 273.
- (1998) Ultra-microscopy , vol.73 , pp. 273
- Larson, D.J.¹ Miller, M.K.² Ulfig, R.M.³ Matyi, R.J.⁴ Camus, P.P.⁵ Kelly, T.T.⁶

12
- 80052554305
- R. Haydock, D.R. Kingham, Phys. Rev. Lett. 44 (1980).
- (1980) Phys. Rev. Lett. , vol.44
- Haydock, R.¹ Kingham, D.R.²

13
- 0003662668
- Cambridge University Press
- T.T. Tsong, Atom probe field ion microscopy, field emission and surfaces and interfaces at atomic resolution, Cambridge University Press, 1990.
- (1990) Atom probe field ion microscopy, field emission and surfaces and interfaces at atomic resolution
- Tsong, T.T.¹

14
- 0000045687
- T.T. Tsong, Surf. Sci. 70 (1978) 211.
- (1978) Surf. Sci. , vol.70 , pp. 211
- Tsong, T.T.¹

15
- 80052529194
- Oxford
- J. Houard, Atom Probe Workshop, Oxford, 2009.
- (2009) Atom Probe Workshop
- Houard, J.¹

16
- 0029632711
- P. Bas, A. Bostel, B. Deconihout, D. Blavette, Appl. Surf. Sci. 87-88 (1995) 298.
- (1995) Appl. Surf. Sci. , vol.87-88 , pp. 298
- Bas, P.¹ Bostel, A.² Deconihout, B.³ Blavette, D.⁴

17
- 34548010545
- A. Grenier, R. Larde, E. Cadel, F. Vurpillot, J. Juraszek, J. Teillet, N. Tiercelin, J. Appl. Phys. 102 (2007) 033912.
- (2007) J. Appl. Phys. , vol.102 , pp. 033912
- Grenier, A.¹ Larde, R.² Cadel, E.³ Vurpillot, F.⁴ Juraszek, J.⁵ Teillet, J.⁶ Tiercelin, N.⁷

18
- 62549088267
- A. Shariq, S. Mutas, K. Wedderhoff, C. Klein, H. Hortenbach, S. Teichert, P. Kucher, S.S.A. Gerstl, Ultramicroscopy 109 (2009) 472.
- (2009) Ultramicroscopy , vol.109 , pp. 472
- Shariq, A.¹ Mutas, S.² Wedderhoff, K.³ Klein, C.⁴ Hortenbach, H.⁵ Teichert, S.⁶ Kucher, P.⁷ Gerstl, S.S.A.⁸

19
- 85030591010
- In this issue
- S. Koelling, et al., IFES 2010 proceedings, in this issue.
- IFES 2010 proceedings
- Koelling, S.¹

20
- 80052522416
- E.A. Marquis, B.P. Geiser, T.J. Prosa, D.J. Larson, J. Microsc. (2010) 1365-2818.
- (2010) J. Microsc. , pp. 1365-2818
- Marquis, E.A.¹ Geiser, B.P.² Prosa, T.J.³ Larson, D.J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.