Traceable measurements of small forces and local mechanical properties

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Campbellová, Anna ^a   Valtr, Miroslav ^a   Zůda, Jaroslav ^a   Klapetek, Petr ^a  

^a CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

metrology; nanoindentation; uncertainty analysis

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; HARDNESS; MEASUREMENTS; MECHANICAL PROPERTIES; NANOCOMPOSITE FILMS; NANOINDENTATION; NANOTECHNOLOGY; UNITS OF MEASUREMENT;

ATOMIC FORCE MICROSCOPE CANTILEVERS; LOCAL MECHANICAL PROPERTIES; MATERIAL DEVELOPMENT; NANO-INDENTATION INSTRUMENT; NANOSCALE DEVICE FABRICATION; THIN-FILM DEPOSITIONS; UNCERTAINTY EVALUATION; UNCERTAINTY PROPAGATION;

UNCERTAINTY ANALYSIS;

EID: 80051705563     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094007     Document Type: Article

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