Development of nanomechanical measurement methods on the basis of MEMS;Entwicklung Nanomechanischer messverfahren auf der grundlage von MEMS

Technisches Messen

Volumn 76, Issue 6, 2009, Pages 317-322

  Li, Zhi ^a   Gao, Sai ^a   Herrmann, Konrad ^a   Wolff, Helmut ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Electrostatic comb drive; Microelectromechanical system; Nanoindentor; Nanomechanical measurement method; Nanotensile test system

Indexed keywords

ELECTROSTATIC COMB DRIVES; MEASUREMENT SYSTEM; MEASUREMENT TECHNIQUES; NANOINDENTOR; NANOMECHANICAL MEASUREMENTS; PERFORMANCE PARAMETERS; SENSORS AND ACTUATORS; TEST SYSTEMS;

ELECTROMECHANICAL DEVICES; MEMS;

ACTUATORS;

EID: 67651033984     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: 10.1524/teme.2009.0944     Document Type: Article

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