Compact field programmable gate array (FPGA)-based multi-axial interferometer for simultaneous tilt and distance measurement in the sub-nanometre range

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Strube, Sebastian ^a   Molnar, Gabor ^a   Danzebrink, Hans Ulrich ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

atomic force microscopy (AFM); distance measurement; FPGA; interferometry; nanometrology; nanopositioning; nanoscale; tilt measurement

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITIVE SENSORS; DISCRETE FOURIER TRANSFORMS; DISTANCE MEASUREMENT; INDUCTIVE SENSORS; INTERFEROMETERS; INTERFEROMETRY; LOGIC GATES; SIGNAL PROCESSING; SIGNAL RECEIVERS; SPECTROSCOPY;

COMMERCIAL INTERFEROMETERS; NANO SCALE; NANO-POSITIONING; NANOMETROLOGY; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; QUANTITATIVE DETERMINATIONS; TILT MEASUREMENT; TWYMAN-GREEN INTERFEROMETERS;

FIELD PROGRAMMABLE GATE ARRAYS (FPGA);

EID: 80051682920     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094026     Document Type: Article

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