A hybrid scanning probe microscope (SPM) module based on a DVD optical head

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Hwu, E T ^a,b   Illers, H ^a   Jusko, L ^a   Danzebrink, H U ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

Atomic force microscopy (AFM); Nano and micro metrology; Optical DVD pick up head; Optical profilometry; Scanning probe microscopy (SPM)

Indexed keywords

DATA STORAGE EQUIPMENT; IMAGE RECONSTRUCTION; MECHANICAL STABILITY; MICROSCOPES; PICKUPS; PROFILOMETRY; SCANNING PROBE MICROSCOPY; VIDEODISKS;

ATOMIC-RESOLUTION IMAGING; DETECTION SCHEME; DVD OPTICAL HEAD; DVD PICK-UP HEAD; INTERMITTENT-CONTACTS; OPTICAL PROFILOMETRY; STANDALONE SYSTEMS; VERTICAL DISPLACEMENTS;

ATOMIC FORCE MICROSCOPY;

EID: 70350664629     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084005     Document Type: Article

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