The dynamic compensation of nonlinearity in a homodyne laser interferometer

Measurement Science and Technology

Volumn 12, Issue 10, 2001, Pages 1734-1738

  Eom, TaeBong ^a   Kim, JongYun ^a   Jeong, Kyuwon ^b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Chungbuk National University   (South Korea)

Author keywords

Dynamic compensation; Eliptical fitting; Homodyne interferometer; Least squares method; Nonlinearity; Phase quadrature

Indexed keywords

CURVE FITTING; DIGITAL TO ANALOG CONVERSION; LASER APPLICATIONS; LEAST SQUARES APPROXIMATIONS;

HOMODYNE LASER INTERFEROMETERS;

INTERFEROMETERS;

INTERFEROMETRY; LASER MEASUREMENT; MEASUREMENT METHOD; SIZE;

EID: 0035477816     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/12/10/318     Document Type: Article

References (12)

1. Determination and correction of quadrature fringe measurement error in interferometers
2. Optical fringe subdivision with nanometre accuracy
3. A proposed design for a polarization-insensitive optical interferometer system with subnanometric capability
4. Correction of nonlinearity in one-frequency optical interferometry
5. Problems regarding linearity of a laser interferometer with a single-frequency laser
6. Nonlinearity in interferometer measurements
7. Optical sources of nonlinearity in heterodyne interferometers
8. Investigation and compensation of the nonlinearity of heterodyne interferometers
9. Nonlinearity in measurements of length by optical interferometry
10. Linear interpolation of periodic error in a heterodyne laser interferometer at sub nanometre levels
11. Michelson interferometry with 10 pm accuracy
12. Real-time, interferometrically measuring atomic force microscope for direct calibration of standards