Heterodyne interferometer with subatomic periodic nonlinearity

Applied Optics

Volumn 38, Issue 19, 1999, Pages 4089-4094

  Wu, Chien Ming ^a,b   Lawall, John ^a   Deslattes, Richard D ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001461852     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.004089     Document Type: Article

References (7)

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2. C. M. Wu and R. D. Deslattes, “Analytical modeling of the periodic nonlinearity in heterodyne interferometry,” Appl. Opt. 37, 6696-6700 (1998).
3. C. M. Wu and C. S. Su, “Nonlinearity in measurements of length by optical interferometry,” Meas. Sci. Technol. 7, 62-68 (1996).
4. W. Hou and G. Wilkening, “Investigation and compensation of the nonlinearity of heterodyne interferometers,” Precis. Eng. 14, 91-98 (1992).
5. C. M. Wu, C. S. Su, and G. S. Peng, “Correction of nonlinearity in one-frequency optical interferometry,” Meas. Sci. Technol. 7, 520-524 (1996).
6. M. Tanaka, T. Yamagami, and K. Nakayama, “Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels,” IEEE Trans. Instrum. Meas. 38, 552-554 (1989).
7. A. E. Rosenbluth and N. Bobroff, “Optical sources of nonlinearity in heterodyne interferometers,” Precis. Eng. 12, 7-11 (1990).