Structural consequences of ferroelectric nanolithography

Nano Letters

Volumn 11, Issue 8, 2011, Pages 3080-3084

  Jo, Ji Young ^a,e   Chen, Pice ^a   Sichel, Rebecca J ^a   Baek, Seung Hyub ^a   Smith, Ryan T ^a   Balke, Nina ^b   Kalinin, Sergei V ^b   Holt, Martin V ^c   Maser, Jörg ^c   Evans Lutterodt, Kenneth ^d   Eom, Chang Beom ^a   Evans, Paul G ^a  

^a University of Wisconsin Madison   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c ARGONNE NATIONAL LABORATORY   (United States)

^d BROOKHAVEN NATIONAL LABORATORY   (United States)

^e Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

coherent X ray diffraction; domain nanolithography; Ferroelectrics; strain; X ray nanodiffraction

Indexed keywords

AS-GROWN; COHERENT X-RAY DIFFRACTION; DOMAIN NANOLITHOGRAPHY; DOMAIN STATE; DOMAIN STRUCTURE; FERROELECTRIC LAYERS; FERROELECTRIC NANOLITHOGRAPHY; MOSAIC BLOCKS; NANOSCALE PRECISION; PB(ZR , TI)O; PIEZOELECTRIC RESPONSE; PIEZORESPONSE FORCE MICROSCOPY; POLARIZATION STATE; POLARIZED STATE; REMNANT POLARIZATIONS; SCANNING PROBE NANO-LITHOGRAPHY; SCATTERING SIMULATIONS; STRUCTURAL CHARACTERIZATION; STRUCTURAL EFFECT; SYNCHROTRON X RAYS; WRITING PROCESS; X RAY MICRODIFFRACTION; X-RAY NANODIFFRACTION;

COHERENT SCATTERING; DIFFRACTION; FERROELECTRIC MATERIALS; FERROELECTRICITY; LEAD; POLARIZATION; X RAY DIFFRACTION; ZIRCONIUM;

NANOLITHOGRAPHY;

EID: 80051617310     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl2009873     Document Type: Article

References (27)

1. Garcia, R.; Calleja, M.; Rohrer, H. J. Appl. Phys. 1999, 86, 1898-1903
2. Fenwick, O.; Bozec, L.; Credgington, D.; Hammiche, A.; Lazzerini, G. M.; Silberberg, Y. R.; Cacialli, F. Nat. Nanotechnol. 2009, 4, 664-668
3. Zou, S.; Maspoch, D.; Wang, Y.; Mirkin, C. A.; Schatz, G. C. Nano Lett. 2007, 7, 276-280
4. Gruverman, A; Tokumoto, H.; Prakash, A. S.; Aggarwarl, S.; Yang, B.; Wuttig, M.; Ramesh, R.; Venkatesan, T. Appl. Phys. Lett. 1997, 71, 3492-3494
5. Krause, S.; Berbil-Bautista, L.; Herzog, G.; Bode, M.; Wiesendanger, R. Science 2007, 317, 1537-1540
6. Zhang, J. X.; Xiang, B.; He, Q.; Seidel, J.; Zeches, R. J.; Yu, P.; Yang, S. Y.; Wang, C. H.; Chu, Y.-H.; Martin, L. W.; Minor, A. M.; Ramesh, R. Nat. Nanotechnol. 2011, 6, 98-102
7. Kalinin, S. V.; Jesse, S.; Rodriguez, B. J.; Eliseev, E. P.; Gopalan, V.; Morozovska, A. N. Appl. Phys. Lett. 2007, 90, 212903
8. Shu, D.; Maser, J.; Holt, M; Winarski, R. P.; Preissner, C.; Smolyanitskiy, A.; Lai, B.; Vogt, S.; Stephenson, G. B. Ninth International Conference on Synchrotron Radiation Instrumentation AIP Conf. Proc. 2007, 879, 1321-1324
9. Pintilie, L.; Stancu, V.; Trupina, L.; Pintilie, I. Phys. Rev. B 2010, 82, 085319
10. Baek, S. H.; Jang, H. W.; Folkman, C. M.; Li, Y. L.; Winchester, B.; Zhang, J. X.; He, Q.; Chu, Y. H.; Nelson, C. T.; Rzchowski, M. S.; Pan, X. Q.; Ramesh, R.; Chen, L. Q.; Eom, C. B. Nat. Mater. 2010, 9, 309-314
11. Ying, A.; Osting, B.; Noyan, I. C.; Murray, C. E.; Holt, M.; Maser, J. J. Appl. Crystallogr. 2010, 43, 587-595
12. Do, D.-H.; Evans, P. G.; Isaacs, E. D.; Kim, D. M.; Eom, C. B.; Dufresne, E. M. Nat. Mater. 2004, 3, 365-369
13. Als-Nielsen, J.; McMorrow, D. Elements of modern X-ray physics; John Wiley & Sons Ltd.: New York, 2001.
14. Noheda, B.; Gonzalo, J. A.; Cross, L. E.; Guo, R.; Park, S.-E.; Cox, D. E.; Shirane, G. Phys. Rev. B 2000, 61, 8687-8695
15. XOP 2.3, available at http://www.esrf.eu/UsersAndScience/Experiments/TBS/ SciSoft/xop2.3.
16. Kalinin, S. V.; Bonnell, D. A. Phys. Rev. B 2001, 63, 125411
17. Fong, D. D.; Kolpak, A. M.; Eastman, J. A.; Streiffer, S. K.; Fuoss, P. H.; Stephenson, G. B.; Thompson, C.; Kim, D. M.; Choi, K. J.; Eom, C. B.; Grinberg, I.; Rappe, A. M. Phys. Rev. Lett. 2006, 96, 127601
18. Junquera, J.; Ghosez, P. Nature 2003, 422, 506-509
19. Grigoriev, A.; Sichel, R.; Lee, H. N.; Landahl, E. C.; Adams, B.; Dufresne, E. M.; Evans, P. G. Phys. Rev. Lett. 2008, 100, 027604
20. Bratkovsky, A. M.; Levanyuk, A. P. Phys. Rev. Lett. 2008, 100, 149701
21. Grigoriev, A.; Sichel, R. J.; Jo, J. Y.; Choudhury, S.; Chen, L.-Q.; Lee, H. N.; Landahl, E. C.; Adams, B. W.; Dufresne, E. M.; Evans, P. G. Phys. Rev. B 2009, 80, 014110
22. Morozovska, A. N.; Eliseev, E. A.; Svechnikov, S. V.; Krutov, A. D.; Shur, V. Y.; Borisevich, A. Y.; Maksymovych, P.; Kalinin, S. V. Phys. Rev. B 2010, 81, 205308
23. Pertsev, N. A.; Zembilgotov, A. G.; Tagantsev, A. K. Phys. Rev. Lett. 1998, 80, 1988-1991
24. Haeni, J. H.; Irvin, P.; Chang, W.; Uecker, R.; Reiche, P.; Li, Y. L.; Choudhury, S.; Tian, W.; Hawley, M. E.; Craigo, B.; Tagantsev, A. K.; Pan, X. Q.; Streiffer, S. K.; Chen, L. Q.; Kirchoefer, S. W.; Levy, J.; Schlom, D. G. Nature 2004, 430, 758-761
25. Cao, J.; Ertekin, E.; Srinivasan, V.; Fan, W.; Huang, S.; Zheng, H.; Yim, J. W. L.; Khanal, D. R.; Ogletree, D. F.; Grossman, J. C.; Wu, J. Nat. Nanotechnol. 2009, 4, 732-737
26. Renner, Ch.; Aeppli, G.; Kim, B.-G.; Soh, Y.-A.; Cheong, S.-W Nature 2002, 416, 518-521
27. Wolf, S. A.; Awschalom, D. D.; Buhrman, R. A.; Daughton, J. M.; von Molnár, J. M.; Roukes, M. L.; Chtchelkanova, A. Y.; Treger, D. M. Science 2001, 294, 1488-1495