Simultaneous capacitive and electrothermal position sensing in a micromachined nanopositioner

IEEE Electron Device Letters

Volumn 32, Issue 8, 2011, Pages 1146-1148

  Zhu, Y ^a   Moheimani, S O R ^b   Yuce, M R ^b  

^a GRIFFITH UNIVERSITY   (Australia)

^b UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Capacitive position sensing; electrothermal position sensing; micromachined nanopositioner; sensor fusion

Indexed keywords

ACTUATION VOLTAGES; CAPACITIVE SENSOR; HIGHER FREQUENCIES; LOW FREQUENCY; LOWER NOISE; MAXIMUM DISPLACEMENT; MICROMACHINED; MICROMACHINED NANOPOSITIONER; NANO-POSITIONER; NOISE PERFORMANCE; POSITION SENSING; SENSOR FUSION; SINGLE CHIPS;

ACTUATORS; DISPLAY DEVICES; ELECTROSTATIC ACTUATORS; POWER SPECTRAL DENSITY; SENSORS; SPECTRAL DENSITY;

FREQUENCY RESPONSE;

EID: 79960930137     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2011.2155027     Document Type: Article

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