Determination of lateral mode dispersion from full-field imaging of film bulk acoustic resonator motion

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2003, Pages 280-283

  Telschow, Ken L ^a   Larson III, John D ^b  

^a IDAHO NATIONAL LABORATORY   (United States)

^b Agilent Technology Laboratories   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DISPERSION; ACOUSTIC RESONATORS; ACOUSTIC VARIABLES MEASUREMENT; ALUMINUM NITRIDE; ELECTRODES; FOURIER TRANSFORMS; HOLOGRAPHY; IMAGE ANALYSIS; PHOTOREFRACTIVE MATERIALS; SCANNING;

ACOUSTIC MOTION; FILM BULK ACOUSTIC RESONATOR MOTION (FBAR); LAMB WIRES; LATERAL MODE DISPERSION;

IMAGING TECHNIQUES;

EID: 4143079401     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. K. L. Telschow, V. A. Deason, D. L. Cottle, and J. D. Larson III, "Full-field Imaging of Acoustic Motion at Nanosecond Time and Micron Length Scales," 2002 IEEE Ultrasonics Symposium Proceedings, October 8-11, Munich, Germany, D. Yuhas and S. Schneider, eds., IEEE, Piscataway, NJ. Vol.1, 601-604 (2002).
2. K. L. Telschow, V. A. Deason, D. L. Cottle and J. D. Larson III, "UHF Acoustic Microscopic Imaging of Resonator Motion" 2000 IEEE Ultrasonics Symposium Proceedings, S.C. Schneider, M. Levy, B. R. McAvoy eds., IEEE, Piscataway, NJ. Vol.1, 631-634 (2000).
3. K. L. Telschow, V. A. Deason, D. L. Cottle, and J. D. Larson III, "Full-Field Imaging Of GHz Film Bulk Acoustic Resonator Motion," to be published in the IEEE_Trans. Ultrason., Ferroelect., Freq. Contr. (2003).
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7. Y. Takagaki, P. V. Santos, E. Wiebicke, O. Brandt, H.-P. Schonherr and K. H. Ploog, "Superhigh-frequency surface-acoustic-wave transducers using AlN layers grown on SiC substrates," Appl. Phys. Lett.81(14), 2538-2540 (2002)
8. O. M. Mukdadi, Y. M. Desai, S. K. Datta, A. H. Shah and A. J. Niklasson, "Elastic guided waves in a layered plate with rectangular cross section," J. Acoust. Soc. Am 112(5), 1766-1779 (2002).