Large-area hard magnetic L10-FePt nanopatterns by nanoimprint lithography

Nanotechnology

Volumn 22, Issue 31, 2011, Pages

  Bublat, T ^a   Goll, D ^a,b  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b AALEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COERCIVITIES; DOT DIMENSIONS; DOT SIZE; FABRICATION PROCESS; NANO PATTERN; NANO-STRUCTURED; NANODOTS; OUT-OF-PLANE TEXTURES; PERPENDICULAR MAGNETIZATION; SINGLE-DOMAIN STATE; TOP-DOWN APPROACH; ULTRAVIOLET-NANOIMPRINT LITHOGRAPHY;

INDUCTIVELY COUPLED PLASMA; MAGNETIC FORCE MICROSCOPY; PLATINUM; REACTIVE ION ETCHING;

NANOIMPRINT LITHOGRAPHY;

EID: 79960759166     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/31/315301     Document Type: Article

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