Increased thermal stability of Ti-Al-N thin films by Ta alloying

Surface and Coatings Technology

Volumn 211, Issue , 2012, Pages 98-103

  Rachbauer, R ^a   Holec, D ^a   Mayrhofer, P H ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

Author keywords

Age hardening; Density functional theory (DFT); Oxidation; Ti Al Ta N; TiAlN

Indexed keywords

AB INITIO; ANNEALING EXPERIMENTS; APPLICATION-ORIENTED; AS-DEPOSITED FILMS; BONDING STRENGTH; COHESIVE ENERGIES; DECOMPOSITION PROCESS; DENSITY FUNCTIONAL THEORIES (DFT); IN-VACUUM; LAYERED OXIDES; MATERIALS DEVELOPMENT; NITRIDE LAYERS; QUATERNARY SYSTEMS; SUB-LATTICES; SUPERSATURATED SOLID SOLUTIONS; TA CONTENT; TI-AL-TA-N; TIALN; WURTZITE STRUCTURE;

AGE HARDENING; ALUMINUM; ALUMINUM NITRIDE; DENSITY FUNCTIONAL THEORY; HARDNESS; NITRIDES; OXIDATION; PROTECTIVE COATINGS; SCALE (DEPOSITS); THERMODYNAMIC STABILITY; THIN FILMS; TRANSITION METALS; VAPOR DEPOSITION; ZINC SULFIDE;

TANTALUM;

EID: 79960695342     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.07.009     Document Type: Article

References (33)

1. Münz W.D. J. Vac. Sci. Technol. A 1986, 4(6):2717.
2. Holleck H. Surf. Coat. Technol. 1988, 36:151.
3. PalDey S., Deevi S.C. Mater. Sci. Eng. A 2003, 342:58.
4. Hörling A., Hultman L., Oden M., Sjölen J., Karlsson L. J. Vac. Sci. Technol. A 2002, 20:1815.
5. Hörling A., Hultman L., Odén M., Sjölen J., Karlsson L. Surf. Coat. Technol. 2005, 191:384.
6. Mayrhofer P.H., Hörling A., Karlsson L., Sjölen J., Larsson T., Mitterer C., Hultman L. Appl. Phys. Lett. 2003, 83:2049.
7. Donohue L.A., Smith I.J., Münz W.D., Petrov I., Greene J.E. Surf. Coat. Technol. 1997, 94-95:226.
8. Flink A., Andersson J.M., Alling B., Daniel R., Sjölen J., Karlsson L., Hultman L. Thin Solid Films 2008, 517:714.
9. Chen L., Holec D., Du Y., Mayrhofer P.H. Thin Solid Films 2011, 519:5503.
10. Derflinger V.H., Schütze A., Ante M. Surf. Coat. Technol. 2006, 200:4693.
11. Kutschej K., Mayrhofer P.H., Kathrein M., Polcik P., Mitterer C. Surf. Coat. Technol. 2004, 188-89:358.
12. Gatterer J., Dufek G., Ettmayer P., Kieffer R. Monatsh. Chem. 1975, 106:1137.
13. Pfeiler M., Fontalvo G.A., Wagner J., Kutschej K., Penoy M., Michotte C., Mitterer C., Kathrein M. Tribol. Lett. 2008, 30:91.
14. Rachbauer R., Holec D., Lattemann M., Hultman L., Mayrhofer P.H. Int. J. Mater. Res. (formerly Z. Metallkd.) 2011, 102:735.
15. Counts W.A., Friák M., Raabe D., Neugebauer J. Acta Mater. 2009, 57:69.
16. Oliver W.C., Pharr G.M. J. Mater. Res. 1992, 7:1564.
17. Rachbauer R., Holec D., Mayrhofer P.H. Appl. Phys. Lett. 2010, 97.
18. Kresse G., Furthmüller J. Phys. Rev. B 1996, 54:11169.
19. Kresse G., Joubert D. Phys. Rev. B 1999, 59:1758.
20. Wang Y., Perdew J.P. Phys. Rev. B 1991, 44:13298.
21. Blaha P., Schwarz K., Madsen G., Kvasnicka D., Luitz J. Comput. Phys. Commun. 1990, 59:399. (2000).
22. Wei S.H., Ferreira L.G., Bernard J.E., Zunger A. Phys. Rev. B 1990, 42:9622.
23. Holec D., Rovere F., Mayrhofer P.H., Barna P.B. Scr. Mater. 2010, 62:349.
24. Matenoglou G.M., Koutsokeras L.E., Lekka C.E., Abadias G., Kosmidis C., Evangelakis G.A., Patsalas P. Surf. Coat. Technol. 2009, 204:911.
25. Physical Chemistry 2009, Oxford University Press, New York. P.W. Atkins (Ed.).
26. Matenoglou G.M., Lekka C.E., Koutsokeras L.E., Karras G., Kosmidis C., Evangelakis G.A., Patsalas P. J. Appl. Phys. 2009, 105.
27. Holleck H. J. Vac. Sci. Technol. A 1986, 4:2661.
28. Rachbauer R., Massl S., Stergar E., Holec D., Kiener D., Keckes J., Patscheider J., Stiefel M., Leitner H., Mayrhofer P.H. J. Appl. Phys. 2011, 110. art. no. 023515.
29. Rafaja D., Wüstefeld C., Baehtz C., Klemm V., Dopita M., Motylenko M., Michotte C., Kathrein M. Metall. Mater. Trans. A: Phys. Metall. Mater. Sci. 2011, 42:559.
30. McIntyre D., Greene J.E., Hakansson G., Sundgren J.E., Münz W.D. J. Appl. Phys. 1990, 67:1542.
31. Vaz F., Rebouta L., Andritschky M., Da Silva M.F., Soares J.C. J. Eur. Ceram. Soc. 1997, 17:1971.
32. Pfeiler M., Scheu C., Hutter H., Schnöller J., Michotte C., Mitterer C., Kathrein M. J. Vac. Sci. Technol A 2009, 27:554.
33. Leyens C. Titanium and Titanium Alloys 2003, 207. Wiley-VCH, New York. M. Peters (Ed.).