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Philosophical Magazine Letters

Volumn 91, Issue 7, 2011, Pages 465-472

Tribological properties of SiC coatings deposited by r.f. magnetron sputtering as a function of substrate temperature

(6) Kumar, N a Dash, S a Rajagopalan, S a Bahuguna, Ashok a Tyagi, A K a Raj, Baldev a

a INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH (India)

Author keywords

friction; magnetron sputtering; phases; SiC films; tribology

Indexed keywords

304LN STAINLESS STEEL; COATING THICKNESS; COEFFICIENT OF FRICTIONS; CRYSTALLINE FILMS; DIFFERENT SUBSTRATES; MICRO-RAMAN SPECTRA; PHASES; R.F. MAGNETRON SPUTTERING; SIC COATINGS; SIC FILMS; SILICON CARBIDE COATINGS; SUBSTRATE TEMPERATURE; TRIBOLOGICAL PROPERTIES; WEAR TRACKS;

AMORPHOUS FILMS; COATINGS; CRYSTALLINE MATERIALS; FRICTION; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SILICON CARBIDE; STAINLESS STEEL; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; TRIBOLOGY; WEAR RESISTANCE;

SUBSTRATES;

EID: 79960681933 PISSN: 09500839 EISSN: 13623036 Source Type: Journal
DOI: 10.1080/09500839.2011.583287 Document Type: Article

Times cited : (6)

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