Highly stable spatio-temporal mechanical characterization of nanocontact between sharp tips using electrostatic microactuator inside transmission electron microscope

Japanese Journal of Applied Physics

Volumn 50, Issue 7 PART 1, 2011, Pages

  Ishida, Tadashi ^a   Sato, Takaaki ^a   Nabeya, Shinsuke ^a   Kakushima, Kuniyuki ^a,b   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SCALE STRUCTURES; ELECTROSTATIC MICROACTUATORS; GOLD NANOCONTACT; MECHANICAL CHARACTERISTICS; MECHANICAL CHARACTERIZATIONS; MICRO-ELECTRO-MECHANICAL; NANO CONTACTS; SHARP TIP; SPATIAL RESOLUTION; SPATIO-TEMPORAL; SPRING CONSTANTS; TEM IMAGES; TEM OBSERVATIONS; TRANSMISSION ELECTRON MICROSCOPE;

ACTUATORS; ELECTRON MICROSCOPES; ELECTROSTATIC ACTUATORS; MECHANICAL PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURES; STRAIN HARDENING; TRANSMISSION ELECTRON MICROSCOPY;

FRACTURE;

EID: 79960657285     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.077201     Document Type: Article

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