Strategies for patterning silicon nanostructures with diblock copolymers, in view of application to microelectronics and optoelectronics

Science of Advanced Materials

Volumn 3, Issue 3, 2011, Pages 490-495

  Gay, Guillaume ^a   Baron, Thierry ^b   Jalaguier, Eric ^a   Agraffeil, Claire ^b   Salhi, Billel ^b   Chevolleau, Thierry ^b   Cunge, Gilles ^b   Aissou, Karim ^c   De Salvo, Barbara ^a  

^a CEA LETI   (France)

^b CNRS   (France)

^c CENTRE DE RECHERCHES SUR LES MACROMOLÉCULES VÉGÉTALES CERMAV CNRS   (France)

Author keywords

Diblock copolymers; Nanopatterning.; Nanopillars; Nanowires; Silicon nanostructures

Indexed keywords

EID: 79960584875     PISSN: 19472935     EISSN: 19472943     Source Type: Journal    
DOI: 10.1166/sam.2011.1173     Document Type: Article

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