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Journal of Crystal Growth

Volumn 328, Issue 1, 2011, Pages 25-29

Development of phase-pure CuAlO2 thin films grown on c-plane sapphire substrates prepared by RF sputtering

(4) Su, Chun Tsung a Lee, Hsin Yen a Wu, Bin Kun a Chern, Ming Yau a

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

Author keywords

A1. Annealing; A3. RF Sputtering; B1. Oxides; B2. Transparent conducting oxides

Indexed keywords

A1. ANNEALING; ANNEALING PROCESS; AS-DEPOSITED FILMS; B1. OXIDES; B2. TRANSPARENT CONDUCTING OXIDES; C-PLANE SAPPHIRE; C-PLANE SAPPHIRE SUBSTRATES; CERAMIC TARGET; DEPOSITION TEMPERATURES; ORDERS OF MAGNITUDE; P-TYPE CONDUCTIVITY; POST ANNEALING; RADIO FREQUENCIES; RF-SPUTTERING; ROOM TEMPERATURE; SAPPHIRE SUBSTRATES; VISIBLE REGION;

ALUMINUM; AMORPHOUS FILMS; ANNEALING; DEPOSITION; ELECTRIC CONDUCTIVITY; LEAD OXIDE; SAPPHIRE; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

COPPER;

EID: 79960560482 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2011.06.012 Document Type: Article

Times cited : (16)

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