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Sol-gel glass waveguide and grating on silicon
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Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask
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0037528553
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Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask
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Negative tone hybrid sol-gel material for electron-beam lithography
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0042111049
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Diffraction gratings in sol-gel films by direct contact printing using a Uv-mercury lamp
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Fabrication of sub-micron period diffraction gratings in self-processing sol-gel glasses
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Single-step fabrication of diffraction gratings on hybrid sol-gel glass using holographic interference lithography
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0141490491
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Single step fabrication of continuous micro-optical elements in hybrid sol-gel glass by laser direct writing
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W. X. Yu, X.-C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, and K. V. Koudriachov, "Single step fabrication of continuous micro-optical elements in hybrid sol-gel glass by laser direct writing," Opt. Express 10, 443-448 (2002), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-10-10-443
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Improved linear response to UV exposure and its interpretation of SiO2/TiO2 hybrid sol-gel glass
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