Optical gas sensing properties of thermally hydrocarbonized porous silicon Bragg reflectors

Optics Express

Volumn 17, Issue 7, 2009, Pages 5446-5456

  Jalkanen, Tero ^a   Torres Costa, Vicente ^b   Salonen, Jarno ^a   Bjorkqvist, Mikko ^a   Makila, Ermei ^a   Martinez Duart, Jose Manuel ^b   Lento, Vesa Pekka ^a,c  

^a UNIVERSITY OF TURKU   (Finland)

^b UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^c UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

BRAGG REFLECTORS; CARBONIZATION; CHEMICAL DETECTION; GAS DETECTORS; REFLECTION; THERMAL CONDUCTIVITY;

ACETYLENE DECOMPOSITION; GAS COMPOSITIONS; GAS SENSING PROPERTIES; HIGH QUALITY; INEXPENSIVE MEANS; OPTICAL GAS SENSING; SILICON BRAGG REFLECTOR; THERMAL CARBONIZATION;

POROUS SILICON;

CARBON; HYDROCARBON; SILICON;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; EQUIPMENT; EQUIPMENT DESIGN; GAS; GENETIC PROCEDURES; INSTRUMENTATION; OPTICAL INSTRUMENTATION; POROSITY; REFRACTOMETRY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TEMPERATURE;

BIOSENSING TECHNIQUES; CARBON; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GASES; HYDROCARBONS; OPTICAL DEVICES; POROSITY; REFRACTOMETRY; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SILICON; TEMPERATURE;

EID: 65249140562     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.005446     Document Type: Article

References (28)

1. L, T, Canhain, "Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers," Appl. Phys. Lett. 57, 1046-1048 (1990).
2. L. M. Peter, D. J. Ripley, and R. I. Wielgosz, "In-situ monitoring of internal surface-area during the growth of porous silicon/' Appl. Phys. Lett. 66, 2355-2357 (1995).
3. H. Münder, C. Andrzejak, M. G. Berger, T. Eickhoff, H. Liith, W. Theiss, U. Rossow, W. Richter, R. Herino, and M. Ligeon, "Optical characterization of porous silicon layers formed on heavily p-doped substrates," Appl. Surf. Sci. 6, 56-58 (1992).
4. L. T. Canham, "Bioactive silicon structure fabrication through nanoetching techniques," Adv. Mater. 7, 1033- 1037 (1995).
5. R. B. Bjorklund, S. Zangooie, and H. Arwin, "Color changes in thin porous silicon films caused by vapor exposure," Appl. Phys. Lett. 69, 3001-3003 (1996).
6. V.S.-Y. Lin, K. Motesharei, K.-P.S. Dancil, M.J. Sailor, and M.R. Ghadiri, "A porous silicon-based optical interferometric biosensor," Science 278, 840-843 (1997).
7. R. C. Anderson, R. S. Muller, and C. W. Tobias, "Investigations of porous silicon for vapor sensing," Sens. Actuators A 21-23, 835-839 (1990).
8. C. Pickering, M. I. J. Beale, D. J. Robbins, P. J. Pearson, and R. Greet", "Optical properties of porous silicon films," Thin Solid Films 125, 157-163 (1985).
9. G. Vincent, "Optical properties of porous silicon superlattices," Appl. Phys. Lett. 64, 2367-2369 (1994).
10. M. G. Berger, C. Dieker, M. Thonissen, L. Vescan, H. Lüth, H. Münder, W. Theiss, M. Wernke, and P. Grosse, "Porosity superlattices: a new class of Si heterostructures," J. Phys. D 27, 1333-1336 (1994).
11. V. Torres-Costa, R. J. Martín-Palma, and J. M. Martínez-Duart, "Optical characterization of porous silicon films and multilayer filters/' Appl. Phys. A 79, 1919-1923 (2004).
12. P. A. Snow, E. K. Squire, P. St. J. Russell, and L. T. Canham, "Vapor sensing using the optical properties of porous silicon bragg mirrors," J. Appl. Phys. 86, 1781-1784 (1999).
13. M.S. Salem, M.J. Sailor, F. A. Harraz, T. Sakka, and Y. H. Ogata, "Sensing of chemical vapor using a porous multilayer prepared from lighdy doped silicon," Phys. Status Solidi C 4, 2073-2077 (2007).
14. M. G. Berger, R. Arens-Fischer, M. Thönissen, M. Krüger, S. Billat, H. Lüth, S. Hillbrich, W. Theiss, and P. Grosse, "Dielectric filters made of PS: advanced performance by oxidation and new layer structures," Thin Solid Films 297, 237-240 (1997).
15. M. Krüger, S. Hilbrich, M. Thonissen, D. Scheyen, W. Theiss, and H. Luth, "Suppression of ageing effects in porous silicon interference filters," Opt. Commun. 146, 309-315 (1998).
16. J. Chapron, S. A. Alekseev, V. Lysenko, V. N. Zaitsev, and D. Barbier, "Analysis of interaction between chemical agents and porous Si nanostructures using optical sensing properties of infra-red rugate filters," Sens. Actuators B 120, 706-711 (2007).
17. M. S. Salem, M. J. Sailor, F. A. Harraz, T. Sakka, and Y. H. Ogata, "Electrochemical stabilization of porous silicon multilayers for sensing various chemical compounds," J. Appl. Phys. 100, Art. No. 083520 (2006).
18. V. Torres-Costa, J. Salonen, V-P. Lehto, R. J. Martfn-Palma, and J. M. Martinez-Duart, "Passivation of nanostruc- tured silicon optical devices by thermal carbonization," Microporous Mesoporous Mater. 111, 636-638 (2008).
19. V. Torres-Costa, R.J. Martin-Palma, J.M. Martinez-Duart, J. Salonen, and V-P. Lehto, "Effective passivation of porous silicon optical devices by thermal carbonization," J. Appl. Phys. 103, Art. No. 083124 (2008).
20. J. Salonen, V.-P. Lehto, M. Bjorkqvist, E. Laine, and L. Niinistö, "Studies of thermally-carbonized porous silicon surfaces," Phys. Status Solidi A 182, 123-126 (2000).
21. J. Salonen, E. Laine, and L. Niinisto, "Thermal carbonization of porous silicon surface by acetylene," J. Appl. Phys. 91, 456-461 (2002).
22. J. Salonen, M. Björkqvist, E. Laine, and L. Niinistö, "Stabilization of porous silicon surface by thermal decomposition of acetylene," Appl. Surf. Sci. 225, 389-394 (2004).
23. M. Björkqvist, J. Salonen, J. Paaski, and E. Laine, "Characterization of thermally carbonized porous silicon humidity sensor," Sens. Actuators A 112, 244-247 (2004).
24. M. Björkqvist, J. Salonen, E. Laine, and L. Niinistö, "Comparison of stabilizing treatments on porous silicon for sensor applications," Phys. Status Solidi A 197, 374-377 (2003).
25. CRC Handbook of Chemistry and Physics 88th edition, D.R. Lide, ed., (CRC Press/Taylor and Francis, Boca Raton, FL, 2007-2008).
26. J. McMurry, in: Organic Chemistry (5th edition), (Thomson Brooks/Cole,2000).
27. H. A. Macleod, in: Thin-film optical filters (Second edition), (Adam Hilger Ltd, Bristol, 1986), chap. 5.
28. V. Torres-Costa, J. Salonen, T. Jalkanen, V-P. Lehto, R. J. Martín-Palma, and J. M. Martínez-Duart, "Carbonization of porous silicon optical gas sensors for enhanced stability and sensitivity," Phys. Status Solidi A, 1-3 (2009)/DOI 10.1002/pssa.200881052.