Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

Surface and Coatings Technology

Volumn 205, Issue SUPPL. 2, 2011, Pages

  Vašina, Petr ^a   Soucek, Pavel ^a   Schmidtová, Tereza ^a   Eliáš, Marek ^a   Buršíková, Vilma ^a   Jílek, Mojmír ^b   Schäfer, Jan ^c   Buršík, Jirí ^d  

^a MASARYK UNIVERSITY   (Czech Republic)

^b SHM Ltd   (Czech Republic)

^c INP Greifswald   (Germany)

^d INSTITUTE OF PHYSICS OF MATERIALS   (Czech Republic)

Author keywords

Carbon; Composite; Magnetron; Mechanical properties; Titanium

Indexed keywords

COATING HARDNESS; COMPOSITE; DEPTH-PROFILE ANALYSIS; HIGH HARDNESS; HYDROGENATED AMORPHOUS CARBON; LOW FRICTION COEFFICIENTS; LOW POWER RF; MAGNETIC FIELD CONFIGURATIONS; NANOCRYSTALLINES; NC-TIC/A-C:H; SIMPLE METHOD; STAINLESS STEEL SUBSTRATES; THICK COATINGS; YOUNG'S MODULUS;

AMORPHOUS CARBON; COMPOSITE COATINGS; DEPTH PROFILING; ELASTIC MODULI; ELASTICITY; FRICTION; HARDNESS; MAGNETIC FIELDS; STAINLESS STEEL; SUBSTRATES; TITANIUM; TITANIUM CARBIDE;

COATINGS;

EID: 79959801041     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.02.038     Document Type: Article

References (17)

1. Czyzniewski A., Prechtl W. J. Mater. Process. Technol. 2004, 157-158:274.
2. Sánchez-López J.C., Martínez-Martínez D., Lópes-Cartes C., Fernández A. Surf. Coat. Technol. 2008, 202:4011.
3. Cao D.M., Feng B., Meng W.J., Rehn L.E., Baldo P.M., Khonsari M.M. Appl. Phys. Lett. 2001, 79/3:329.
4. Musil J., Novák P., Cerstvỳ R., Soukup Z. J. Vac. Sci. Technol. A 2010, 28:244.
5. Pei Y.T., Galvan D., De Hosson J.Th.M., Cavaleiro A. Surf. Coat. Technol. 2005, 198:44.
6. Galvan D., Pei Y.T., De Hosson J.Th.M. Acta Mater. 2005, 53:3925.
7. Hu Y., Li L., Cai X., Chen Q., Chu P.K. Diamond Relat. Mater. 2007, 16:181.
8. Galvan D., Pei Y.T., De Hosson J.Th.M. J. Vac. Sci. Technol. A 2006, 24(4):1441.
9. Gulbinski W., Mathur S., Shen H., Suszko T., Gilewicz A., Warcholinski B. Appl. Surf. Sci. 2005, 239:302.
10. Wang H., Zhang S., Li Y., Sun D. Thin Solid Films 2008, 516:5419.
11. Martínez-Martínez D., López-Cartes C., Fernández A., Sánchez-López J.C. Thin Solid Films 2009, 517:1662.
12. El Mel A.A., Angleraud B., Gautron E., Granier A., Tessier P.Y. Surf. Coat. Technol. 2010, 204:1880.
13. Hopwood J. Phys. Plasmas 1998, 5:1624.
14. Vašina P., Hytková T., Eliáš M. Plasma Sources Sci. Technol. 2009, 18:025011. (8pp).
15. Oliver W.C., Pharr G.M. J. Mater. Res. 2004, 19:3.
16. Goldstein J., Newbury D.E., Joy D.C., Lyman C.E., Echlin P., Lifshin E., Sawyer L., Michael J.R. Scanning Electron Microscopy and X-Ray Analysis 2003, Kluwer, New York. third ed.
17. Johnson K.L. J. Mech. Phys. Solids 1970, 18:115.