Ambient vibration-based MEMS piezoelectric energy harvester for green energy source

2011 4th International Conference on Modeling, Simulation and Applied Optimization, ICMSAO 2011

Volumn , Issue , 2011, Pages

  Saadon, Salem ^a   Sidek, Othman ^a  

^a SCHOOL OF CHEMICAL ENGINEERING   (Malaysia)

Author keywords

Cantilever beam; Energy harvesting; MEMS; PZT; Vibration

Indexed keywords

AMBIENT VIBRATIONS; ELECTRIC ENERGIES; ENERGY SOURCE; GREEN ENERGY SOURCES; GREEN TECHNOLOGY; MECHANICAL VIBRATIONS; MEMS APPLICATIONS; MICROGENERATORS; PIEZOELECTRIC ENERGY; PIEZOELECTRIC HARVESTER; POWER HARVESTING; POWER MEMS; POWER SOURCES; PZT; REMOTE SYSTEMS;

ALTERNATIVE FUELS; COMPUTER SIMULATION; HARVESTERS; OPTIMIZATION; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; VIBRATIONS (MECHANICAL); WIRELESS SENSOR NETWORKS;

ENERGY HARVESTING;

EID: 79959673693     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMSAO.2011.5775554     Document Type: Conference Paper

References (23)

1. T. J. Johnson, D. Charnegie, W. W. Clark, M. Buric, and G. Kusic, "Energy harvesting from mechanical vibrations using piezoelectric cantilever beams - art. no. 61690D", Smart Structures and Materials 2006: Damping and Isolation, vol. 6169, pp. D1690-D1690, 2006.
2. T. H. Ng and W. H. Liao, "Feasibility study of a selfpowered piezoelectric sensor", Smart Structures and Materials 2004: Smart Electronics, Mems, Biomems and Nanotechnology, vol. 5389, pp. 377-388, 2004.
3. T. H. Ng and W. H. Liao, "Sensitivity analysis and energy harvesting for a self-powered piezoelectric sensor", Journal of Intelligent Material Systems and Structures, vol. 16, pp. 785-797, 2005. (Pubitemid 41498480)
4. S. N. Jiang, X. F. Li, S. H. Guo, Y. T. Hu, J. S. Yang, and Q. Jiang, "Performance of a piezoelectric bimorph for scavenging vibration energy", Smart Materials & Structures, vol. 14, pp. 769-774, 2005. (Pubitemid 41107909)
5. T. A. Anderson and D. W. Sexton, "A vibration energy harvesting sensor platform for increased industrial efficiency - art. no. 61741Y", Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, Pts 1 and 2, vol. 6174, pp. Y1741-Y1741, 2006.
6. L. Mateu and F. Moll, "Optimum piezoelectric bending beam structures for energy harvesting using shoe inserts", Journal of Intelligent Material Systems and Structures, vol. 16, pp. 835-845, 2005. (Pubitemid 41498484)
7. S. Roundy, E. S. Leland, J. Baker, E. Carleton, E. Reilly, E. Lai, B. Otis, J. M. Rabaey, P. K. Wright, and V. Sundararajan, "Improving power output for vibration-based energy scavengers", Ieee Pervasive Computing, vol. 4, pp. 28-36, 2005. (Pubitemid 40495603)
8. J. Baker, S. Roundy and P. Wright, "Alternative geometries for increasing power density in vibration energy scavenging for wireless sensor networks", Proceeding 3rd International Energy Conversion Engineering Conference, San Francisco, California, August 15-18, 2005.
9. H. W. Kim, A. Batra, S. Priya, K. Uchino, D. Markley, R. E. Newnham, and H. F. Hofmann, "Energy harvesting using a piezoelectric "cymbal" transducer in dynamic environment", Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers, vol. 43, pp. 6178-6183, 2004.
10. S. M. Shahruz, "Design of mechanical band-pass filters for energy scavenging", Journal of Sound and Vibration, vol. 292, pp. 987-998, 2006.
11. S. M. Shahruz, "Limits of performance of mechanical band-pass filters used in energy scavenging", Journal of Sound and Vibration, vol. 293, pp. 449-461, 2006.
12. J. Rastegar, C. Pereira, and H. L. Nguyen, "Piezoelectric-based power sources for harvesting energy from platforms with low frequency vibration - art. no. 617101", Smart Structures and Materials 2006: Industrial and Commercial Applications of Smart Structures Technologies, vol. 6171, pp. 17101-17101, 2006.
13. M. Marzencki, S. Basrour, B. Charlot, A. Grasso, M. Colin, L. Valbin, "Design and Fabrication of Piezoelectric Micro Power Generators for Autonomous Microsystems", DTIP'05, Montreux, Switzerland, June 01-03, 2005
14. M. Marzencki, Y. Ammar, and S. Basrour, "Integrated power harvesting system including a MEMS generator and a power management circuit", Sensors and Actuators a-Physical, vol. 145, pp. 363-370, 2008.
15. D. Shen, J. H. Park, J. Ajitsaria, S. Y. Choe, H. C. Wikle, and D. J. Kim, "The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting", Journal of Micromechanics and Microengineering, vol. 18, 2008.
16. M. Renaud, K. Karakaya, T. Sterken, P. Fiorini, C. Van Hoof, R. Puers, "Fabrication, modeling and characterization of MEMS piezoelectric vibration harvesters", Sensors and Actuators a-Physical, vol. 145, pp. 380-386, 2008.
17. H. B. Fang, J. Q. Liu, Z. Y. Xu, L. Dong, L. Wang, D. Chen, B. C. Cai, and Y. Liu, "Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting", Microelectronics Journal, vol. 37, pp. 1280-1284, 2006. (Pubitemid 44767769)
18. J. Q. Liu, H. B. Fang, Z. Y. Xu, X. H. Mao, X. C. Shen, D. Chen, H. Liao, and B. C. Cai, "A MEMS-based piezoelectric power generator array for vibration energy harvesting", Microelectronics Journal, vol. 39, pp. 802-806, 2008.
19. Y. B. Jeon, R. Sood, J. H. Jeong, and S. G. Kim, "MEMS power generator with transverse mode thin film PZT", Sensors and Actuators a-Physical, vol. 122, pp. 16-22, 2005. (Pubitemid 41037282)
20. B. S. Lee, W. J. Wu, W. P. Shih, D. Vasic, and F. Costa, "Power harvesting using piezoelectric MEMS generator with interdigital electrodes", 2007 Ieee Ultrasonics Symposium Proceedings, Vols 1-6, pp. 1598-1601, 2007.
21. B. S. Lee, S. C. Lin, W. J. Wu, X. Y. Wang, P. Z. Chang, and C. K. Lee, "Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film", Journal of Micromechanics and Microengineering, vol. 19, 2009.
22. P. Muralt, M. Marzencki, B. Belgacem, F. Calame, S. Basrour, "Vibration Energy Harvesting with PZT Micro Device", Procedia Chemistry, vol. 1, pp. 1191-1194, 2009.
23. R. Elfrink, T. M. Kamel, M. Goedbloed, S. Matova, D. Hohlfeld, Y. van Andel, and R. van Schaijk, "Vibration energy harvesting with aluminum nitride-based piezoelectric devices", Journal of Micromechanics and Microengineering, vol. 19, 2009.