Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition

Thin Solid Films

Volumn 519, Issue 14, 2011, Pages 4598-4602

  Kim, Ki Hwan ^a   Lefeuvre, Emmanuel ^a   Châtelet, Marc ^a   Pribat, Didier ^a,b   Cojocaru, Costel Sorin ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b Sungkyunkwan University   (South Korea)

Author keywords

Carbon nanotubes; Hot filament chemical vapor deposition; Porous anodic alumina

Indexed keywords

A-CARBON; CARBON NANOTUBE ARRAY; ETCHING AGENTS; GAS LINES; HOT-FILAMENT; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; LOW SUBSTRATE TEMPERATURE; PARAMETRIC STUDY; POROUS ANODIC ALUMINA; POROUS ANODIC ALUMINA TEMPLATE;

ACTIVATED ALUMINA; ALUMINUM SHEET; AMORPHOUS CARBON; CARBON NANOTUBES; GAS PIPELINES; METHANE;

CHEMICAL VAPOR DEPOSITION;

EID: 79958834616     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.334     Document Type: Conference Paper

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