Nanofabrication of a quantum dot array: Atomic force microscopy of electropolished aluminum

Journal of Electronic Materials

Volumn 25, Issue 10, 1996, Pages 1585-1592

  Ricker, R E ^a   Miller, A E ^b   Yue, D F ^b   Banerjee, G ^b   Bandyopadhyay, S ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF NOTRE DAME   (United States)

^c University of Notre Dame   (United States)

Author keywords

Al; Atomic force microscopy (AFM); Chemical mechanical polishing; Electropolishing; Nanofabrication; Quantum dots

Indexed keywords

EID: 0000520059     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02655580     Document Type: Article

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