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Journal of Applied Physics

Volumn 109, Issue 10, 2011, Pages

In-situ observation of non-hemispherical tip shape formation during laser-assisted atom probe tomography

(6) Koelling, S a,b Innocenti, N a,c Schulze, A a,b Gilbert, M a,b Kambham, A K a,b Vandervorst, W a,b

a IMEC (Belgium)

b KU LEUVEN (Belgium)

c UNIVERSITY OF LIÈGE (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM PROBE; ATOM PROBE TOMOGRAPHY; EMISSION PATTERN; FIELD OF VIEWS; HEATING EFFECT; IN-FIELD; IN-SITU; IN-SITU OBSERVATIONS; LASER WAVELENGTH; LASER-ASSISTED; LASER-ASSISTED EVAPORATION; NON-HOMOGENEOUS; NONUNIFORMITY; OXIDE LAYER THICKNESS; SEM IMAGING; TIME-DEPENDENT; TIP SHAPE;

PROBES; SILICON COMPOUNDS; SILICON OXIDES;

ATOMS;

EID: 79958792966 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3592339 Document Type: Conference Paper

Times cited : (41)

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