Progress in the physical modeling of carrier illumination

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 3, 2006, Pages 1131-1138

  Dortu, Fabian ^a,b   Clarysse, Trudo ^b   Loo, Roger ^b   Pawlak, Bartek ^b   Delhougne, Romain ^b   Vandervorst, Wilfried ^a,b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; NONDESTRUCTIVE EXAMINATION; OPTICAL PROPERTIES; PUMPING (LASER); REFRACTIVE INDEX;

CARRIER ILLUMINATION; METAL OXIDE SEMICONDUCTOR STRUCTURE; PHYSICAL MODELING;

SEMICONDUCTOR MATERIALS;

EID: 33744807747     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2190654     Document Type: Article

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